WO2025137732 - LIQUID METAL ALLOY FEED MATERIALS FOR ION IMPLANTATION
National phase entry is expected:
Publication Number
WO/2025/137732
Publication Date
26.06.2025
International Application No.
PCT/US2024/061817
International Filing Date
23.12.2024
Title **
[English]
LIQUID METAL ALLOY FEED MATERIALS FOR ION IMPLANTATION
[French]
MATÉRIAUX D'ALIMENTATION EN ALLIAGE MÉTALLIQUE LIQUIDE POUR IMPLANTATION IONIQUE
Applicants **
AXCELIS TECHNOLOGIES, INC.
Inventors
ROMANOV, Vladimir
COLVIN, Neil
MOORE, Ed
VERKERK, Udo
BASSOM, Neil
WENZEL, Kevin
Priority Data
63/614,001
22.12.2023
US
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
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| Number of Office Actions | * |
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International Searching Authority |
EPO
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
* |
| Patent Delivery |
Send the Letters Patent by Courier
* |
| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2169 | |
| EPO | Filing, Examination, Granting | 10681 | |
| Japan | Filing, Examination, Granting | 2309 | |
| South Korea | Filing, Examination, Granting | 2385 | |
| USA | Filing, Examination, Granting | 5340 |
Total:
22,884
The term for entry into the National Phase has expired. This quotation is for informational purposes only
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Abstract[English]
C. The liquid metal alloy precursor compositions are suitable for use in ion implantation systems configured for liquid metal ion sources (LMIS) or capillary drive sources. Also disclosed are processes for implanting liquid metal alloy ion source precursor compositions.[French]
C. Les compositions de précurseur d'alliage métallique liquide sont appropriées pour être utilisées dans des systèmes d'implantation ionique configurés pour des sources d'ions métalliques liquides (LMIS) ou des sources d'entraînement capillaire. Sont également divulgués des processus d'implantation de compositions de précurseur de sources d'ions d'alliage métallique liquide.