WO2025096998 - APPARATUS AND METHOD FOR TWO-DIMENSIONAL ION BEAM PROFILING
National phase entry is expected:
Publication Number
WO/2025/096998
Publication Date
08.05.2025
International Application No.
PCT/US2024/054188
International Filing Date
01.11.2024
Title **
[English]
APPARATUS AND METHOD FOR TWO-DIMENSIONAL ION BEAM PROFILING
[French]
APPAREIL ET PROCÉDÉ DE PROFILAGE DE FAISCEAU IONIQUE BIDIMENSIONNEL
Applicants **
AXCELIS TECHNOLOGIES, INC.
Inventors
CRISTOFORO, Michael
VANDERBERG, Bo
Priority Data
63/594,963
01.11.2023
US
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
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| Number of Pages with Drawings | * |
| Pages of Specification | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| * | |
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2261 | |
| EPO | Filing, Examination, Granting | 11446 | |
| Japan | Filing, Examination, Granting | 2370 | |
| South Korea | Filing, Examination, Granting | 2379 | |
| USA | Filing, Examination, Granting | 4940 |
Total:
23,396
The term for entry into the National Phase has expired. This quotation is for informational purposes only
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Abstract[English]
. A rotary input apparatus (240) may control a rotational position of the cylinder. A linear translation (242) apparatus controls a linear position of the cylinder and aperture plate. A controller may determine a uniformity and angular profile of the ion beam in a plurality of dimensions based, at least in part, on the rotational position of the cylinder, the linear position of the cylinder and aperture plate, and the respective beam current of the ion beam received.[French]
. Un appareil d'entrée rotatif (240) peut commander une position de rotation du cylindre. Un appareil de translation linéaire (242) commande une position linéaire du cylindre et de la plaque d'ouverture. Un dispositif de commande peut déterminer une uniformité et un profil angulaire du faisceau ionique dans une pluralité de dimensions sur la base, au moins en partie, de la position de rotation du cylindre, de la position linéaire du cylindre et de la plaque d'ouverture, et du courant de faisceau respectif du faisceau ionique reçu.