WO2024233871 - ORGANOTIN PHOTORESIST COMPOSITION AND METHOD OF STABILIZATION

National phase entry is expected:
Publication Number WO/2024/233871
Publication Date 14.11.2024
International Application No. PCT/US2024/028746
International Filing Date 10.05.2024
Title **
[English] ORGANOTIN PHOTORESIST COMPOSITION AND METHOD OF STABILIZATION
[French] COMPOSITION DE RÉSINE PHOTOSENSIBLE D'ORGANOÉTAIN ET PROCÉDÉ DE STABILISATION
Applicants **
LU, Feng 3700 Parkview Lane, Apt 25D Irvine, California 92612-1838, US
Inventors
LU, Feng 3700 Parkview Lane, Apt 25D Irvine, California 92612-1838, US
Priority Data
63/465,610   11.05.2023   US
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Quotation for National Phase entry

Country StagesTotal
China Filing1242
EPO Filing, Examination6302
Japan Filing531
South Korea Filing575
USA Filing, Examination2405
MasterCard Visa

Total: 11055

Abstract[English] are each independently a substituted or unsubstituted alkyl, alkenyl, alkynyl, cycloalkyl, or cycloalkenyl group with 1 to 20 carbon atoms, or a substituted or unsubstituted aryl group with 6-20 carbon atoms, or an amine, cyclic amine, cyano, ether, cyclic ether, ester, cyclic ester, halide, nitro, silyl, thiol, or carbonyl group. A method of stabilization of organotin photoresist composition comprises adding an organic additive.[French] L'invention concerne une composition de résine photosensible d'organoétain pour rayonnement actinique et un procédé de stabilisation. La composition de résine photosensible d'organoétain comprend un composé d'organoétain représenté par les formules chimiques [RSnOO]4Sn, [RSnOO]3SnR1, [RSnOO]2SnR1 2, [RSnOO]SnR1 3, [R3SnO]4Sn, [R3SnO]3SnR1, [R3SnO]2SnR1 2, [R3SnO]SnR1 3, ou R2Sn(µ-O)2Sn(µ-O)2SnR2, un solvant et un additif, R, R1 étant chacun indépendamment un groupe alkyle, alcényle, alcynyle, cycloalkyle ou cycloalcényle substitué ou non substitué ayant de 1 à 20 atomes de carbone, ou un groupe aryle substitué ou non substitué ayant de 6 à 20 atomes de carbone, ou un groupe amine, amine cyclique, cyano, éther, éther cyclique, ester, ester cyclique, halogénure, nitro, silyle, thiol ou carbonyle. Un procédé de stabilisation de la composition de résine photosensible d'organoétain comprend l'ajout d'un additif organique.
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