WO2025207020 - HIGH THERMAL RESISTANCE SANDWICHED STRUCTURE AND FORMATION FOR ELECTROSTATIC CHUCKS
National phase entry is expected:
Publication Number
WO/2025/207020
Publication Date
02.10.2025
International Application No.
PCT/SG2024/050196
International Filing Date
28.03.2024
Title **
[English]
HIGH THERMAL RESISTANCE SANDWICHED STRUCTURE AND FORMATION FOR ELECTROSTATIC CHUCKS
[French]
STRUCTURE EN SANDWICH À RÉSISTANCE THERMIQUE ÉLEVÉE ET FORMATION POUR MANDRINS ÉLECTROSTATIQUES
Applicants **
APPLIED ANGSTROM TECHNOLOGY PTE. LTD.
Inventors
YANG, Deng Liang
Application details
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International Searching Authority |
MOIP
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2492 | |
| EPO | Filing, Examination, Granting | 19331 | |
| Japan | Filing, Examination, Granting | 2618 | |
| South Korea | Filing, Examination, Granting | 2204 | |
| USA | Filing, Examination, Granting | 8540 |
Total:
35,185
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Abstract[English]
The present invention includes a thermal resistant sandwiched structure and formation for electrostatic chucks. Embodiments also include a process for manufacturing an electrostatic chuck with improved interface integrity. The process can include a step of anodizing both surfaces of a plate and forming a dense layer of aluminum oxide (Al2O3). In aspects, the process uses a step of plasma electrolytic oxidation (PEO). In aspects, the electrostatic chucks described herein have a coating layer that includes Al2O3 (aluminum oxide), Y2O3 (yittrium oxide) and/or Er2O3 (erbium (III) oxide). The high thermal resistance sandwiched structure and formation for electrostatic chucks can form an ultra-stable interface between a ceramic and metal interface.[French]
La présente invention comprend une structure en sandwich à résistance thermique et une formation pour des mandrins électrostatiques. Des modes de réalisation comprennent également un procédé de fabrication d'un mandrin électrostatique ayant une intégrité d'interface améliorée. Le procédé peut comprendre une étape d'anodisation des deux surfaces d'une plaque et de formation d'une couche dense d'oxyde d'aluminium (Al2O3). Selon certains aspects, le procédé utilise une étape d'oxydation électrolytique par plasma (PEO). Selon certains aspects, les mandrins électrostatiques décrits ici ont une couche de revêtement qui comprend Al2O3 (oxyde d'aluminium), Y2O3 (oxyde d'yittrium) et/ou Er2O3 (oxyde d'erbium (III)). La structure en sandwich à résistance thermique élevée et la formation de mandrins électrostatiques peuvent former une interface ultra-stable entre une interface céramique et métallique.