WO2025099518 - HAZARDOUS GAS DILUTION
National phase entry is expected:
Publication Number
WO/2025/099518
Publication Date
15.05.2025
International Application No.
PCT/IB2024/060216
International Filing Date
17.10.2024
Title **
[English]
HAZARDOUS GAS DILUTION
[French]
DILUTION DE GAZ DANGEREUX
Applicants **
EDWARDS VACUUM LLC
Inventors
GOEKE, Jacob Henry
GORDON, Michael
HART, Autumn
CAIN, Patrick
Priority Data
2317078.0
07.11.2023
GB
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
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| Number of Office Actions | * |
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International Searching Authority |
EPO
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
* |
| Patent Delivery |
Send the Letters Patent by Courier
* |
| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2053 | |
| EPO | Filing, Examination, Granting | 8624 | |
| Japan | Filing, Examination, Granting | 2183 | |
| South Korea | Filing, Examination, Granting | 2133 | |
| USA | Filing, Examination, Granting | 5340 |
Total:
20,333
The term for entry into the National Phase has expired. This quotation is for informational purposes only
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Abstract[English]
A controller, dilution and abatement system. The controller dynamically controlling an amount of a dilution gas to be added to an exhaust stream from a process tool. The controller comprises: an input for receiving a signal indicative of at least one of: a current or future amount of hazardous gas that the process tool exhausts; processing circuitry configured to determine an amount of dilution gas required to dilute the indicated amount of hazardous gas to a required level; output circuitry configured to output a control signal to dynamically control a flow rate of the dilution gas to be added to the exhaust stream to provide the required dilution level.[French]
Sont divulgués un contrôleur, ainsi qu'un système de dilution et de réduction. Le contrôleur régule dynamiquement la quantité d'un gaz de dilution à ajouter à un flux d'échappement provenant d'un outil de traitement. Le contrôleur comprend : une entrée pour recevoir un signal indiquant la quantité courante et/ou future de gaz dangereux que l'outil de traitement laisse échapper ; des circuits de traitement configurés pour déterminer une quantité de gaz de dilution nécessaire pour diluer la quantité indiquée de gaz dangereux à un niveau requis ; des circuits de sortie configurés pour émettre en sortie un signal de commande pour réguler dynamiquement le débit du gaz de dilution à ajouter au flux d'échappement pour obtenir le niveau de dilution requis.