WO2024236380 - ELECTRO-OPTIC DEVICE WITH PASSIVATED BTO AND METHOD OF FABRICATION THEREFOR
National phase entry:
Publication Number
WO/2024/236380
Publication Date
21.11.2024
International Application No.
PCT/IB2024/053856
International Filing Date
19.04.2024
Title **
[English]
ELECTRO-OPTIC DEVICE WITH PASSIVATED BTO AND METHOD OF FABRICATION THEREFOR
[French]
DISPOSITIF ÉLECTRO-OPTIQUE À BTO PASSIVÉ ET SON PROCÉDÉ DE FABRICATION
Applicants **
LUMIPHASE AG
Inventors
ABEL, Stefan
ELTES, Felix
SCHUMANN, Timo
CZORNOMAZ, Lukas
Priority Data
63/502,425
16.05.2023
US
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| Translation |
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2178 | |
| EPO | Filing, Examination, Granting | 10848 | |
| Japan | Filing, Examination, Granting | 2372 | |
| South Korea | Filing, Examination, Granting | 2426 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
22,564
The term for entry into the National Phase has expired. This quotation is for informational purposes only
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Abstract[English]
An electro-optic method and device including a passivation or protection structure for Pockels materials. This can be a single layer of or possibly a stack of several layers of different materials. Typically, this structure is located between a waveguide, such as one containing silicon nitride and the Pockels material, such as a BTO (BaTiO3) layer. It has been discovered that a reduction reaction of BTO severely alters the layer properties (primarily increasing conductivity and optical absorption).[French]
L'invention concerne un procédé et un dispositif électro-optiques comprenant une structure de passivation ou de protection pour des matériaux de Pockels. Il peut s'agir d'une seule couche ou éventuellement d'un empilement de plusieurs couches de matériaux différents. Typiquement, cette structure est située entre un guide d'ondes, tel qu'un guide d'ondes contenant du nitrure de silicium et le matériau de Pockels, tel qu'une couche BTO (BaTiO3). Il a été découvert qu'une réaction de réduction de BTO modifie fortement les propriétés de couche (augmentant principalement la conductivité et l'absorption optique).