WO2024236380 - ELECTRO-OPTIC DEVICE WITH PASSIVATED BTO AND METHOD OF FABRICATION THEREFOR
National phase entry:
Publication Number
WO/2024/236380
Publication Date
21.11.2024
International Application No.
PCT/IB2024/053856
International Filing Date
19.04.2024
Title **
[English]
ELECTRO-OPTIC DEVICE WITH PASSIVATED BTO AND METHOD OF FABRICATION THEREFOR
[French]
DISPOSITIF ÉLECTRO-OPTIQUE À BTO PASSIVÉ ET SON PROCÉDÉ DE FABRICATION
Applicants **
LUMIPHASE AG
Laubisrütistrasse 44
8712 Stäfa, CH
Inventors
ABEL, Stefan
Sophie-Taeuber Strasse 10
CH-8050 Zürich, CH
ELTES, Felix
Baumackerstrasse 43
CH-8050 Zürich, CH
SCHUMANN, Timo
Zelgstrasse 30
CH-8134 Adliswil, CH
CZORNOMAZ, Lukas
Baldernstrasse 3
CH-8802 Kilchberg, CH
Priority Data
63/502,425
16.05.2023
US
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
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| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
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International Searching Authority |
EPO
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Translation |
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing | 1243 | |
| EPO | Filing, Examination | 6281 | |
| Japan | Filing | 594 | |
| South Korea | Filing | 575 | |
| USA | Filing, Examination | 2710 |
Total: 11403 USD
The term for entry into the National Phase has expired. This quotation is for informational purposes only
Abstract[English]
An electro-optic method and device including a passivation or protection structure for Pockels materials. This can be a single layer of or possibly a stack of several layers of different materials. Typically, this structure is located between a waveguide, such as one containing silicon nitride and the Pockels material, such as a BTO (BaTiO3) layer. It has been discovered that a reduction reaction of BTO severely alters the layer properties (primarily increasing conductivity and optical absorption).[French]
L'invention concerne un procédé et un dispositif électro-optiques comprenant une structure de passivation ou de protection pour des matériaux de Pockels. Il peut s'agir d'une seule couche ou éventuellement d'un empilement de plusieurs couches de matériaux différents. Typiquement, cette structure est située entre un guide d'ondes, tel qu'un guide d'ondes contenant du nitrure de silicium et le matériau de Pockels, tel qu'une couche BTO (BaTiO3). Il a été découvert qu'une réaction de réduction de BTO modifie fortement les propriétés de couche (augmentant principalement la conductivité et l'absorption optique).