WO2025133695 - PHYSICAL VAPOR DEPOSITION BASED PIEZOELECTRIC RESONATOR STRUCTURE

National phase entry is expected:
Publication Number WO/2025/133695
Publication Date 26.06.2025
International Application No. PCT/IB2024/000721
International Filing Date 17.12.2024
Title **
[English] PHYSICAL VAPOR DEPOSITION BASED PIEZOELECTRIC RESONATOR STRUCTURE
[French] STRUCTURE DE RÉSONATEUR PIÉZOÉLECTRIQUE À BASE DE DÉPÔT PHYSIQUE EN PHASE VAPEUR
Applicants **
SKYWORKS GLOBAL PTE. LTD.
Inventors
HILL, Michael, David
SHIN, Kwang, Jae
BADER, Stefan
SHIRAKAWA, Alexander, Augusto
SMALL, Martha, Kennedy
Priority Data
63/612,537   20.12.2023   US
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting2363
EPO Filing, Examination, Granting16139
Japan Filing, Examination, Granting2431
South Korea Filing, Examination, Granting2043
USA Filing, Examination, Granting5540
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Total: 28,516

The term for entry into the National Phase has expired. This quotation is for informational purposes only

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Abstract[English] N until the total thickness reaches a desired value; and forming an upper electrode on top of the resulting multilayer piezoelectric structure.[French] N jusqu'à ce que l'épaisseur totale atteigne une valeur souhaitée ; et la formation d'une électrode supérieure au-dessus de la structure piézoélectrique multicouche résultante.