WO2024175978 - VACUUM PUMP
National phase entry is expected:
Publication Number
WO/2024/175978
Publication Date
29.08.2024
International Application No.
PCT/IB2023/058810
International Filing Date
06.09.2023
Title **
[English]
VACUUM PUMP
[French]
POMPE À VIDE
Applicants **
EDWARDS VACUUM LLC
Inventors
CLEMENT, Derek Alexander
Priority Data
2302521.6
22.02.2023
GB
Application details
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International Searching Authority |
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| Recordal of a Change of the Applicant's Name/Address | * |
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* The data is based on automatic recognition. Please verify and amend if necessary.
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1964 | |
| EPO | Filing, Examination, Granting | 8387 | |
| Japan | Filing, Examination, Granting | 2150 | |
| South Korea | Filing, Examination, Granting | 2033 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
19,274
The term for entry into the National Phase has expired. This quotation is for informational purposes only
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Abstract[English]
Vacuum pump comprising: a sputter ion pump, SIP, module, having a first end and a second end; a non-evaporable getter, NEG, module, connected to the second end of the SIP module; an electrical lead of the NEG module running from the first end to the second end of the SIP module; wherein the SIP module comprises an anode having a first surface and an opposite second surface, wherein at least on cylindric opening extends from the first surface to the second surface, wherein the anode further comprises side surfaces extending from the first surface to the second surface, wherein the electrical lead is arranged at the side surface of the anode.[French]
La présente invention concerne une pompe à vide comprenant : un module de pompe à ions par pulvérisation, SIP, ayant une première extrémité et une seconde extrémité ; un module de récupération non évaporable, NEG, connecté à la seconde extrémité du module SIP ; un fil électrique du module NEG allant de la première extrémité à la seconde extrémité du module SIP ; le module SIP comprenant une anode ayant une première surface et une seconde surface opposée, au moins une ouverture cylindrique s'étendant de la première surface à la seconde surface, l'anode comprenant en outre des surfaces latérales s'étendant de la première surface à la seconde surface, le fil électrique étant disposé sur la surface latérale de l'anode.