WO2023089450 - LIQUID FILTER APPARATUS WITH THERMAL SHIELD
National phase entry is expected:
Publication Number
WO/2023/089450
Publication Date
25.05.2023
International Application No.
PCT/IB2022/060742
International Filing Date
08.11.2022
Title **
[English]
LIQUID FILTER APPARATUS WITH THERMAL SHIELD
[French]
APPAREIL À FILTRE LIQUIDE AVEC ÉCRAN THERMIQUE
Applicants **
EDWARDS VACUUM LLC
6416 Inducon Drive West
Sanborn, New York NY 14132, US
Inventors
MAHAWILI, Imad
Edwards Vacuum LLC
1830 Sierra Gardens Drive, STE 80
Roseville, California 95661, US
Priority Data
17/527,643
16.11.2021
US
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
| * | |
| * | |
International Searching Authority |
EPO
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
* |
| Translation |
|
Recalculate
* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing | 1309 | |
| EPO | Filing, Examination | 6421 | |
| Japan | Filing | 593 | |
| South Korea | Filing | 575 | |
| USA | Filing, Examination | 2710 |
Total: 11608 USD
The term for entry into the National Phase has expired. This quotation is for informational purposes only
Abstract[English]
A liquid filter apparatus for gas/solid separation includes a housing with a filter chamber, a semiconductor process gas inlet, and a process gas outlet. The filter chamber forms a liquid reservoir, and the semiconductor process gas inlet and the process gas outlet are in communication with the filter chamber. The housing further includes a filter liquid inlet and a filter liquid outlet, which are in communication with the liquid reservoir for delivering and removing filter fluid, respectively, to and from the liquid reservoir.[French]
L'invention concerne un appareil à filtre liquide pour la séparation gaz/solide comprenant un boîtier pourvu d'une chambre de filtre, une entrée de gaz de traitement de semi-conducteur, et une sortie de gaz de traitement. La chambre de filtre forme un réservoir à liquide, et l'entrée de gaz de traitement de semi-conducteur et la sortie de gaz de traitement sont en communication avec la chambre de filtre. Le boîtier comprend en outre une entrée de liquide de filtre et une sortie de liquide de filtre, qui sont en communication avec le réservoir à liquide pour distribuer et retirer le liquide du filtre, respectivement vers et depuis le réservoir à liquide.