WO2023180216 - NEGATIVELY CHARGED SILICA PARTICLES, METHOD OF PRODUCING SUCH PARTICLES, COMPOSITIONS COMPRISING SUCH PARTICLES, AND A METHOD OF CHEMICAL-MECHANICAL POLISHING USING SUCH PARTICLES
National phase entry:
Publication Number
WO/2023/180216
Publication Date
28.09.2023
International Application No.
PCT/EP2023/056981
International Filing Date
20.03.2023
Title **
[English]
NEGATIVELY CHARGED SILICA PARTICLES, METHOD OF PRODUCING SUCH PARTICLES, COMPOSITIONS COMPRISING SUCH PARTICLES, AND A METHOD OF CHEMICAL-MECHANICAL POLISHING USING SUCH PARTICLES
[French]
PARTICULES DE SILICE CHARGÉES NÉGATIVEMENT, PROCÉDÉ DE PRODUCTION DE TELLES PARTICULES, COMPOSITIONS COMPRENANT DE TELLES PARTICULES, ET PROCÉDÉ DE POLISSAGE CHIMICO-MÉCANIQUE UTILISANT DE TELLES PARTICULES
Applicants **
MERCK PATENT GMBH
Frankfurter Strasse 250
64293 Darmstadt, DE
Inventors
JACQUINOT, Eric
c/o Merck Performance Materials S.A.S.
1 Rue du flottage, BP15
60350 TROSLY BREUIL, FR
GUILLAUD, Frederic
c/o Merck Performance Materials S.A.S.
1 Rue du flottage, BP15
60350 TROSLY BREUIL, FR
Priority Data
22305336.4
22.03.2022
EP
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
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International Searching Authority |
EPO
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| Applicant's Legal Status |
Legal Entity
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| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
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| Translation |
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Recalculate
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing | 1066 | |
| EPO | Filing, Examination | 4588 | |
| Japan | Filing | 590 | |
| South Korea | Filing | 574 | |
| USA | Filing, Examination | 2710 |
Total: 9528 USD
The term for entry into the National Phase has expired. This quotation is for informational purposes only
Abstract[English]
The present application relates to negatively charged silica particles, to a method of producing such particles, and to compositions comprising such particles as well as to a method for chemical mechanical polishing.[French]
La présente invention concerne des particules de silice chargées négativement, un procédé de production de telles particules, et des compositions comprenant de telles particules ainsi qu'un procédé de polissage chimico-mécanique.