WO2023072640 - CLAMP FOR HOLDING AN OBJECT AND METHOD
National phase entry:
Publication Number
WO/2023/072640
Publication Date
04.05.2023
International Application No.
PCT/EP2022/078749
International Filing Date
14.10.2022
Title **
[English]
CLAMP FOR HOLDING AN OBJECT AND METHOD
[French]
PINCE DESTINÉE À MAINTENIR UN OBJET ET PROCÉDÉ
Applicants **
ASML NETHERLANDS B.V.
P.O. Box 324
5500 AH Veldhoven, NL
Inventors
POIESZ, Thomas
P.O. Box 324
5500 AH Veldhoven, NL
VAN ROOIJ, René, Adrianus
P.O. Box 324
5500 AH Veldhoven, NL
STEIN, Alexander
P.O. Box 324
5500 AH Veldhoven, NL
Priority Data
21205594.1
29.10.2021
EP
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
| * | |
| * | |
International Searching Authority |
EPO
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
* |
| Translation |
|
Recalculate
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing | 1103 | |
| EPO | Filing, Examination | 4598 | |
| Japan | Filing | 592 | |
| South Korea | Filing | 574 | |
| USA | Filing, Examination | 3310 |
Total: 10177 USD
The term for entry into the National Phase has expired. This quotation is for informational purposes only
Abstract[English]
The disclosure provides a clamp comprising a dielectric member; a conductive element disposed on the dielectric member and comprised of a first conductive material; and a number of burls arranged on the conductive element for supporting the object, each burl comprising a second conductive material, wherein the clamp comprises a stack of alternating layers of etch resistant material and a third conductive material arranged between the conductive element and the number of burls.[French]
L’invention concerne une pince comprenant un organe diélectrique ; un élément conducteur disposé sur l’organe diélectrique et constitué d’un premier matériau conducteur ; et un certain nombre de nœuds agencés sur l’élément conducteur afin de supporter l’objet, chaque nœud comprenant un deuxième matériau conducteur. La pince comprend un empilement de couches alternées de matériau résistant à la gravure et d’un troisième matériau conducteur agencé entre l’élément conducteur et les nœuds.