WO2023057525 - SOURCE WAFER, METHOD, AND OPTOELECTRONIC DEVICES

National phase entry:
Publication Number WO/2023/057525
Publication Date 13.04.2023
International Application No. PCT/EP2022/077727
International Filing Date 05.10.2022
Title **
[English] SOURCE WAFER, METHOD, AND OPTOELECTRONIC DEVICES
[French] TRANCHE SOURCE, PROCÉDÉ ET DISPOSITIFS OPTOÉLECTRONIQUES
Applicants **
ROCKLEY PHOTONICS LIMITED
Inventors
YANG, Hua
DERNAIKA, Mohamad
PETERS, Frank
YU, Guomin
Priority Data
2114242.7   05.10.2021   GB
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting2369
EPO Filing, Examination, Granting14239
Japan Filing, Examination, Granting2593
South Korea Filing, Examination, Granting2980
USA Filing, Examination, Granting8340
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Total: 30,521

The term for entry into the National Phase has expired. This quotation is for informational purposes only

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Abstract[English] A source wafer for use in a micro-transfer printing process. The source wafer comprising: a wafer substrate; a photonic component, provided in a device coupon, the device coupon being attached to the wafer substrate via a release layer; and one or more etch stop layers, located between the photonic component and the wafer substrate.[French] Tranche source destinée à être utilisée dans un processus d'impression par micro-transfert. La tranche source comprend : un substrat de tranche; un composant photonique, agencé dans un coupon de dispositif, le coupon de dispositif étant fixé au substrat de tranche par l'intermédiaire d'une couche de libération; et une ou plusieurs couches d'arrêt de gravure situées entre le composant photonique et le substrat de tranche.