WO2023057525 - SOURCE WAFER, METHOD, AND OPTOELECTRONIC DEVICES

National phase entry:
Publication Number WO/2023/057525
Publication Date 13.04.2023
International Application No. PCT/EP2022/077727
International Filing Date 05.10.2022
Title **
[English] SOURCE WAFER, METHOD, AND OPTOELECTRONIC DEVICES
[French] TRANCHE SOURCE, PROCÉDÉ ET DISPOSITIFS OPTOÉLECTRONIQUES
Applicants **
ROCKLEY PHOTONICS LIMITED 1 Ashley Road 3rd Floor Altrincham Cheshire WA14 2DT, GB
Inventors
YANG, Hua c/o Rockley Photonics Ireland 13-18 City Quay Dublin, 2, IE
DERNAIKA, Mohamad c/o Rockley Photonics Ireland 13-18 City Quay Dublin, 2, IE
PETERS, Frank c/o Rockley Photonics Ireland 13-18 City Quay Dublin, 2, IE
YU, Guomin c/o Rockley Photonics, Inc. 234 East Colorado Boulevard Suite 600 Pasadena, California 91101, US
Priority Data
2114242.7   05.10.2021   GB
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Quotation for National Phase entry

Country StagesTotal
China Filing1416
EPO Filing, Examination8260
Japan Filing595
South Korea Filing574
USA Filing, Examination6310
MasterCard Visa

Total: 17155

The term for entry into the National Phase has expired. This quotation is for informational purposes only

Abstract[English] A source wafer for use in a micro-transfer printing process. The source wafer comprising: a wafer substrate; a photonic component, provided in a device coupon, the device coupon being attached to the wafer substrate via a release layer; and one or more etch stop layers, located between the photonic component and the wafer substrate.[French] Tranche source destinée à être utilisée dans un processus d'impression par micro-transfert. La tranche source comprend : un substrat de tranche; un composant photonique, agencé dans un coupon de dispositif, le coupon de dispositif étant fixé au substrat de tranche par l'intermédiaire d'une couche de libération; et une ou plusieurs couches d'arrêt de gravure situées entre le composant photonique et le substrat de tranche.
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