WO2023001630 - METHOD FOR PRODUCING A GALLIUM OXIDE LAYER ON A SUBSTRATE
National phase entry:
Publication Number
WO/2023/001630
Publication Date
26.01.2023
International Application No.
PCT/EP2022/069433
International Filing Date
12.07.2022
Title **
[English]
METHOD FOR PRODUCING A GALLIUM OXIDE LAYER ON A SUBSTRATE
[French]
PROCÉDÉ POUR LA PRODUCTION D'UNE COUCHE D'OXYDE DE GALLIUM SUR UN SUBSTRAT
Applicants **
SILTRONIC AG
Einsteinstr. 172 Tower B / Blue Tower
81677 München, DE
Inventors
HÄCKL, Walter
Fasanenstr. 7
84558 Kirchweidach, DE
CHOU, Ta-shun
Streitstr. 23
13587 Berlin, DE
POPP, Andreas
August-B.-Allee 7
15732 Eichwalde, DE
Priority Data
21187231.2
22.07.2021
EP
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
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| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
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International Searching Authority |
EPO
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
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| Translation |
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing | 972 | |
| EPO | Filing, Examination | 4601 | |
| Japan | Filing | 591 | |
| South Korea | Filing | 575 | |
| USA | Filing, Examination | 2710 |
Total: 9449 USD
The term for entry into the National Phase has expired. This quotation is for informational purposes only
Abstract[English]
represents a dimensionless layer surface reflectivity index calculated from the quotient of the measured second layer surface reflectivity and the extrapolated layer surface reflectivity from the regression curve evaluated at the second layer thickness.[French]
représente un indice de réflectivité de surface de couche sans dimension calculé à partir du quotient de la seconde réflectivité de surface de couche mesurée et de la réflectivité de surface de couche extrapolée à partir de la courbe de régression évaluée à la seconde épaisseur de couche.