WO2023285408 - ELECTRONIC DEVICE MANUFACTURING AQUEOUS SOLUTION, METHOD FOR MANUFACTURING RESIST PATTERN AND METHOD FOR MANUFACTURING DEVICE

National phase entry:
Publication Number WO/2023/285408
Publication Date 19.01.2023
International Application No. PCT/EP2022/069365
International Filing Date 12.07.2022
Title **
[English] ELECTRONIC DEVICE MANUFACTURING AQUEOUS SOLUTION, METHOD FOR MANUFACTURING RESIST PATTERN AND METHOD FOR MANUFACTURING DEVICE
[French] SOLUTION AQUEUSE DE FABRICATION DE DISPOSITIF ÉLECTRONIQUE, PROCÉDÉ DE FABRICATION D'UN MOTIF DE RÉSERVE ET PROCÉDÉ DE FABRICATION DE DISPOSITIF
Applicants **
MERCK PATENT GMBH
Inventors
YAMAMOTO, Kazuma
YASHIMA, Tomoyasu
ISHII, Maki
YANAGITA, Hiroshi
Priority Data
2021-117253   15.07.2021   JP
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting1969
EPO Filing, Examination, Granting8097
Japan Filing, Examination, Granting2117
South Korea Filing, Examination, Granting1895
USA Filing, Examination, Granting4740
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Total: 18,818

The term for entry into the National Phase has expired. This quotation is for informational purposes only

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Abstract[English] alkyl, and the solvent (B) comprises water.[French] , et le solvant (B) comprenant de l'eau.

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