WO2026130595 - COMBINED COLUMN OF A SCANNING ELECTRON MICROSCOPE
National phase entry is expected:
Publication Number
WO/2026/130595
Publication Date
25.06.2026
International Application No.
PCT/CZ2025/050102
International Filing Date
15.12.2025
Title **
[English]
COMBINED COLUMN OF A SCANNING ELECTRON MICROSCOPE
[French]
COLONNE COMBINÉE D'UN MICROSCOPE ÉLECTRONIQUE À BALAYAGE
Applicants **
TESCAN GROUP A.S.
Inventors
NEŠPOR, Dušan
SLEZÁK, Martin
SYTAŘ, Petr
Priority Data
PV2024-490
17.12.2024
CZ
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
| * | |
| Number of Office Actions | * |
| * | |
International Searching Authority |
EPO
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
* |
| Patent Delivery |
Send the Letters Patent by Courier
* |
| Translation |
|
* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1893 | |
| EPO | Filing, Examination, Granting | 8746 | |
| Japan | Filing, Examination, Granting | 1837 | |
| South Korea | Filing, Examination, Granting | 1359 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
18,575
Contact Us
Abstract[English]
A combined column of a scanning electron microscope located in a device (1) with at least one beam of charged particles with at least one column (2) containing a source (7) of charged particles producing the charged particles, elements for shaping and directing the charged particles, an objective (13) at a potential forming an objective lens (15) formed by a magnetic field emanating onto the sample, and further a potential tube (18) at a potential different from the potential of the objective (13) positioned along the optical axis of the column (2), wherein the upper end of the potential tube (18) is located behind the source (7) of charged particles in the direction of the current of charged particles, and the lower end of the potential tube (18) is located in the column (2) behind the source (7) of charged particles in the direction of the current of charged particles and simultaneously in front of the objective lens (15) in the direction of the current of charged particles, wherein a deceleration electrostatic field generated as a result of the difference in electric potential between the potential tube (18) and the objective (13) is located between the lower end of the potential tube (18) and the objective lens (15).[French]
L'invention concerne une colonne combinée d'un microscope électronique à balayage situé dans un dispositif (1) comportant au moins un faisceau de particules chargées avec au moins une colonne (2) contenant une source (7) de particules chargées produisant les particules chargées, des éléments pour mettre en forme et diriger les particules chargées, un objectif (13) à un potentiel formant une lentille d'objectif (15) formée par un champ magnétique émanant de l'échantillon, et en outre un tube de potentiel (18) à un potentiel différent du potentiel de l'objectif (13) positionné le long de l'axe optique de la colonne (2), l'extrémité supérieure du tube de potentiel (18) étant située derrière la source (7) de particules chargées dans la direction du courant de particules chargées, et l'extrémité inférieure du tube de potentiel (18) étant située dans la colonne (2) derrière la source (7) de particules chargées dans la direction du courant de particules chargées et simultanément devant la lentille d'objectif (15) dans la direction du courant de particules chargées, un champ électrostatique de décélération généré suite à la différence de potentiel électrique entre le tube de potentiel (18) et l'objectif (13) étant situé entre l'extrémité inférieure du tube de potentiel (18) et la lentille d'objectif (15).