WO2025000170 - A BULK ACOUSTIC WAVE RESONATOR

National phase entry:
Publication Number WO/2025/000170
Publication Date 02.01.2025
International Application No. PCT/CN2023/102254
International Filing Date 26.06.2023
Title **
[English] A BULK ACOUSTIC WAVE RESONATOR
[French] RÉSONATEUR À ONDES ACOUSTIQUES DE VOLUME
Applicants **
HUAWEI TECHNOLOGIES CO., LTD. Huawei Administration Building, Bantian, Longgang District Shenzhen, Guangdong 518129, CN
Inventors
PLESSKI, Viktor Huawei Technologies Duesseldorf GmbH, Riesstr. 25 80992, DE
ZHANG, Naiqing Huawei Administration Building, Bantian, Longgang District Shenzhen, Guangdong 518129, CN
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Quotation for National Phase entry

Country StagesTotal
China Filing1060
EPO Filing, Examination6654
Japan Filing588
South Korea Filing482
USA Filing, Examination2710
MasterCard Visa

Total: 11494

The term for entry into the National Phase has expired. This quotation is for informational purposes only

Abstract[English] The invention allows a structure for a bulk acoustic wave resonator that enables an increase in piezoelectric coupling and in suppression of parasitic modes. The disclosed grooves be-tween interdigital transducer (IDT) electrodes decrease the generation of parasitic modes and block their propagation and resonant accumulation of their amplitudes. Furthermore, the disclosed grooves between the IDT electrodes suppress high-order modes along a horizontal direction and increase a resonance-antiresonance frequency gap of the bulk acoustic wave resonator.[French] L'invention permet d'obtenir une structure pour un résonateur à ondes acoustiques de volume qui permet une augmentation du couplage piézoélectrique et la suppression de modes parasites. Les rainures entre des électrodes de transducteur interdigité (IDT) diminuent la génération de modes parasites et bloquent leur propagation et l'accumulation résonante de leurs amplitudes. En outre, les rainures décrites entre les électrodes IDT suppriment des modes d'ordre élevé le long d'une direction horizontale et augmentent un espace de fréquence de résonance-antirésonance du résonateur à ondes acoustiques de volume.
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