WO2024260593 - A SEMICONDUCTOR STRUCTURE

National phase entry:
Publication Number WO/2024/260593
Publication Date 26.12.2024
International Application No. PCT/EP2024/056803
International Filing Date 14.03.2024
Title **
[English] A SEMICONDUCTOR STRUCTURE
[French] STRUCTURE SEMI-CONDUCTRICE
Applicants **
IQE PLC
Inventors
DARGIS, Rytis
CLARK, Andrew
Priority Data
2309447.7   22.06.2023   GB
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting2516
EPO Filing, Examination, Granting16813
Japan Filing, Examination, Granting2679
South Korea Filing, Examination, Granting3141
USA Filing, Examination, Granting7140
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Total: 32,289

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Abstract[English] An epitaxial semiconductor structure comprising a silicon substrate in <100> orientation. On the substrate are sequentially a bixbyite oxide layer in <111> orientation, a rare earth nitride layer, an aluminium nitride layer, and a gallium nitride layer in <0001> orientation. Advantageously the semiconductor structure results in a better quality GaN layer.[French] L'invention concerne une structure semi-conductrice épitaxiale comprenant un substrat de silicium dans une orientation <100>. Sur le substrat sont séquentiellement présentes une couche d'oxyde de bixbyite dans une orientation <111>, une couche de nitrure de terre rare, une couche de nitrure d'aluminium et une couche de nitrure de gallium dans une orientation <0001>. Avantageusement, la structure semi-conductrice permet d'obtenir une couche de GaN de meilleure qualité.