WO2025122452 - ORGANOTIN POLYMER PHOTORESIST COMPOSITION FOR PHOTOLITHOGRAPHY PATTERNING

National phase entry is expected:
Publication Number WO/2025/122452
Publication Date 12.06.2025
International Application No. PCT/US2024/058181
International Filing Date 03.12.2024
Title **
[English] ORGANOTIN POLYMER PHOTORESIST COMPOSITION FOR PHOTOLITHOGRAPHY PATTERNING
[French] COMPOSITION DE RÉSINE PHOTOSENSIBLE À BASE DE POLYMÈRE D'ORGANOÉTAIN POUR FORMATION DE MOTIFS PAR PHOTOLITHOGRAPHIE
Applicants **
LU, Feng
Inventors
LU, Feng
Priority Data
63/607,241   07.12.2023   US
Application details
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting2247
EPO Filing, Examination, Granting10462
Japan Filing, Examination, Granting2307
South Korea Filing, Examination, Granting2463
USA Filing, Examination, Granting4310
MasterCard Visa
Total: 21,789

The term for entry into the National Phase has expired. This quotation is for informational purposes only

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Abstract[English] group, wherein R is H, a substituted or unsubstituted alkyl, alkenyl, alkynyl, or cycloalkyl group with 1 to 20 carbon atoms, or a substituted or unsubstituted aryl group with 6-20 carbon atoms, or an amino, cyano, ether, ester, halide, nitro, silyl, thiol, or carbonyl group.[French] cyclopentadiényle substitué, R étant H, un groupe alkyle, alcényle, alcynyle ou cycloalkyle substitué ou non substitué ayant de 1 à 20 atomes de carbone, ou un groupe aryle substitué ou non substitué ayant de 6 à 20 atomes de carbone, ou un groupe amino, cyano, éther, ester, halogénure, nitro, silyle, thiol ou carbonyle.