WO2026120368 - CRYOPUMP MONITORING
National phase entry is expected:
Publication Number
WO/2026/120368
Publication Date
11.06.2026
International Application No.
PCT/IB2025/061231
International Filing Date
04.11.2025
Title **
[English]
CRYOPUMP MONITORING
[French]
SURVEILLANCE D'UNE POMPE CRYOGÉNIQUE
Applicants **
EDWARDS VACUUM LLC
Inventors
RICHARDS III, Kenneth Ray
SALOVICH, Nicholai William
Priority Data
2417860.0
05.12.2024
GB
Application details
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| 译文 |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2024 | |
| EPO | Filing, Examination, Granting | 8126 | |
| Japan | Filing, Examination, Granting | 2155 | |
| South Korea | Filing, Examination, Granting | 2071 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
19,116
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Abstract[English]
A sensor for determining an absorption state of cryopanels within a cryopump. The sensor comprises: an absorbent material; a detector for measuring a property of the absorbent material, the property changing as matter is absorbed by the material; and a heating element for heating the absorbent material to release at least some of the absorbed matter. The absorbent material of the sensor is configured to be mounted thermally coupled to a second stage of the cryopump, such that during operation of the cryopump the absorbent material is within 5K of a temperature of the cryopanels of the cryopump.[French]
L'invention concerne un capteur pour déterminer un état d'absorption de panneaux cryogéniques à l'intérieur d'une pompe cryogénique. Le capteur comprend : un matériau absorbant; un détecteur pour mesurer une propriété du matériau absorbant, la propriété variant à mesure qu'une matière est absorbée par le matériau; et un élément chauffant pour chauffer le matériau absorbant pour libérer au moins une partie de la matière absorbée. Le matériau absorbant du capteur est configuré pour être monté en couplage thermique avec un second étage de la pompe cryogénique, de telle sorte que, pendant le fonctionnement de la pompe cryogénique, la température du matériau absorbant ne s'écarte pas de plus de 5K d'une température des panneaux cryogéniques de la pompe cryogénique. (Figure 3)