WO2026093835 - TURBO MOLECULAR PUMP AND ROTATING BODY OF TURBO MOLECULAR PUMP
National phase entry is expected:
Publication Number
WO/2026/093835
Publication Date
07.05.2026
International Application No.
PCT/IB2025/060278
International Filing Date
10.10.2025
Title **
[English]
TURBO MOLECULAR PUMP AND ROTATING BODY OF TURBO MOLECULAR PUMP
[French]
POMPE TURBOMOLÉCULAIRE ET CORPS ROTATIF DE POMPE TURBOMOLÉCULAIRE
Applicants **
EDWARDS JAPAN LIMITED
Inventors
SHOJI, Takeshi
Priority Data
2024-192138
31.10.2024
JP
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
| * | |
| Number of Office Actions | * |
| * | |
International Searching Authority |
EPO
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
* |
| Patent Delivery |
Send the Letters Patent by Courier
* |
| 译文 |
|
* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1880 | |
| EPO | Filing, Examination, Granting | 8126 | |
| Japan | Filing, Examination, Granting | 1846 | |
| South Korea | Filing, Examination, Granting | 1443 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
18,035
Contact Us
Abstract[English]
[Problem] To provide a turbo molecular pump that can improve exhaust performance. [Solving Means] A turbo molecular pump includes: a rotor shaft (113); and 5 a rotor blade (102) that is fixed to the rotor shaft (113), is rotatable integrally, and includes a plurality of stages of blade rows. The turbo molecular pump sucks in and exhausts exhaust gas through rotation of the rotor blade (102). Among the plurality of stages of blade rows, blade rows (102a and 102b) at first and second stages from the top are made of 10 a magnesium alloy, which is a first material, while remaining blade rows (102c, 102d, ・・・) at third and subsequent stages are made of an aluminum alloy, which is a second material. Specific strength of the first material is higher than that of the second material.[French]
Le problème selon la présente invention consiste à fournir une pompe turbomoléculaire qui peut améliorer les performances d'échappement. La solution selon l'invention porte sur une pompe turbomoléculaire qui comprend : un arbre de rotor (113) ; et une pale de rotor (102) qui est fixée à l'arbre de rotor (113), qui peut tourner d'un seul tenant et comprend une pluralité d'étages de rangées de pales. La pompe turbomoléculaire aspire et évacue les gaz d'échappement par la rotation de la pale de rotor (102). Parmi la pluralité d'étages de rangées de pales, des rangées de pales (102a et 102b) au niveau de premier et deuxième étages à partir de la partie supérieure sont composées d'un alliage de magnésium, qui est un premier matériau, tandis que les rangées de pales restantes (102c, 102d, ...) au niveau du troisième étage et des étages suivants sont composées d'un alliage d'aluminium, qui est un second matériau. Une résistance spécifique du premier matériau est supérieure à celle du second matériau.