WO2025238488 - METHOD FOR CONTROLLING A WET ETCHING PROCESS
National phase entry is expected:
Publication Number
WO/2025/238488
Publication Date
20.11.2025
International Application No.
PCT/IB2025/054822
International Filing Date
08.05.2025
Title **
[English]
METHOD FOR CONTROLLING A WET ETCHING PROCESS
[French]
PROCÉDÉ DE COMMANDE D'UN PROCESSUS DE GRAVURE HUMIDE
Applicants **
NEXGEN WAFER SYSTEMS PTE. LTD.
Inventors
KLEINDIENST, Christian
SANDRIESSER, Josef
ROS GONZALEZ, Dante
ABABA DECIERDO, Gregorio Jr.
HUBER, Martin
IBRAHIM, Hazem
Priority Data
24176258.2
16.05.2024
EP
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
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| Number of Drawings | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| * | |
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| 译文 |
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2084 | |
| EPO | Filing, Examination, Granting | 9127 | |
| Japan | Filing, Examination, Granting | 2215 | |
| South Korea | Filing, Examination, Granting | 2192 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
20,358
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Abstract[English]
The disclosure relates to a method (200) for controlling a wet etching process (131, 132, 133), the wet etching process (131, 132, 133) using a dispensing unit (19) for dispensing a chemical liquid (18) containing a chemical etchant for etching a specimen surface of a specimen (1), and a rotation unit (31) for rotating the specimen (1).[French]
L'invention concerne un procédé (200) de commande d'un processus de gravure humide (131, 132, 133), le processus de gravure humide (131, 132, 133) utilisant une unité de distribution (19) pour distribuer un liquide chimique (18) contenant un agent de gravure chimique pour graver une surface d'échantillon d'un échantillon (1), et une unité de rotation (31) pour faire tourner l'échantillon (1).