WO2025202976 - VACUUM PUMP SYSTEM AND INTERFACE CIRCUIT
National phase entry is expected:
Publication Number
WO/2025/202976
Publication Date
02.10.2025
International Application No.
PCT/IB2025/053273
International Filing Date
28.03.2025
Title **
[English]
VACUUM PUMP SYSTEM AND INTERFACE CIRCUIT
[French]
SYSTÈME DE POMPE À VIDE ET CIRCUIT D'INTERFACE
Applicants **
EDWARDS JAPAN LIMITED
Inventors
HONMA, Ryutaro
SUN, Yanbin
Priority Data
2024-057774
29.03.2024
JP
Application details
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| 译文 |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1910 | |
| EPO | Filing, Examination, Granting | 8186 | |
| Japan | Filing, Examination, Granting | 1753 | |
| South Korea | Filing, Examination, Granting | 1253 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
17,842
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Abstract[English]
[Problem] Provided is a vacuum pump system and an interface circuit in which one interface circuit can monitor and control a plurality of vacuum pumps when the plurality of vacuum pumps are monitored and controlled from a customer supervisory control tool via the interface circuit [Solving Means] Turbomolecular pumps 100 and control devices 300 are provided in pairs. An interface circuit 23 and AC/DC power supply circuits 15A, 15B, and 15C are not included in the control devices 300 but are configured in a separate integration unit 400. Conventional interface circuits 13A, 13B, and 13C are provided for respective turbomolecular pumps 100 in order to monitor and control respective control devices 200A, 200B, and 200C. In contrast, the interface circuit 23 integrally monitor and control the control devices 300A, 300B, and 300C. Thus, one interface circuit 23 is configured for three turbomolecular pumps 100.[French]
La présente invention aborde le problème consistant à fournir un système de pompe à vide et un circuit d'interface dans lesquels un circuit d'interface peut surveiller et commander une pluralité de pompes à vide lorsque la pluralité de pompes à vide sont surveillées et commandées à partir d'un outil de commande de supervision de client par l'intermédiaire du circuit d'interface. La solution selon l'invention porte sur des pompes turbomoléculaires (100) et des dispositifs de commande (300) qui sont disposés par paires. Un circuit d'interface (23) et des circuits d'alimentation électrique c.a./c.c. (15A, 15B et 15C) ne sont pas inclus dans les dispositifs de commande (300), mais sont configurés dans une unité d'intégration séparée (400). Des circuits d'interface classiques (13A, 13B et 13C) sont prévus pour des pompes turbomoléculaires (100) respectives afin de surveiller et de commander des dispositifs de commande (200A, 200B et 200C) respectifs. En revanche, le circuit d'interface (23) surveille et commande intégralement les dispositifs de commande (300A, 300B et 300C). Ainsi, un circuit d'interface (23) est configuré pour trois pompes turbomoléculaires (100).