WO2024175979 - SPUTTER ION PUMP MODULE AND VACUUM PUMP
National phase entry is expected:
Publication Number
WO/2024/175979
Publication Date
29.08.2024
International Application No.
PCT/IB2023/058811
International Filing Date
06.09.2023
Title **
[English]
SPUTTER ION PUMP MODULE AND VACUUM PUMP
[French]
MODULE DE POMPE À IONS DE PULVÉRISATION ET POMPE À VIDE
Applicants **
EDWARDS VACUUM LLC
Inventors
CLEMENT, Derek Alexander
Priority Data
2302522.4
22.02.2023
GB
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
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| Number of Office Actions | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
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| * | |
| * | |
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| 译文 |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2039 | |
| EPO | Filing, Examination, Granting | 8746 | |
| Japan | Filing, Examination, Granting | 2218 | |
| South Korea | Filing, Examination, Granting | 2197 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
19,940
The term for entry into the National Phase has expired. This quotation is for informational purposes only
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Abstract[English]
Sputter ion pump, SIP, module for a vacuum pump, comprising a outer structure, an anode having an upper side and an opposite lower side, at least one support element at the upper side or the lower side of the anode to support the anode, wherein the anode is connected to the outer structure by the at least one support element, and a high voltage, HV, conductor extending through the outer structure and connected to the anode to support the anode.[French]
L'invention concerne un module de pompe à ions de pulvérisation, SIP, pour une pompe à vide, comprenant une structure externe, une anode ayant un côté supérieur et un côté inférieur opposé, au moins un élément de support au niveau du côté supérieur ou du côté inférieur de l'anode pour supporter l'anode, l'anode étant reliée à la structure externe par l'au moins un élément de support, et un conducteur haute tension, HV, s'étendant à travers la structure externe et relié à l'anode pour supporter l'anode.