WO2026002632 - MEMS-VORRICHTUNG
National phase entry is expected:
Publication Number
WO/2026/002632
Publication Date
02.01.2026
International Application No.
PCT/EP2025/066303
International Filing Date
11.06.2025
Title **
[German]
MEMS-VORRICHTUNG
[English]
MEMS APPARATUS
[French]
APPAREIL MEMS
Applicants **
ROBERT BOSCH GMBH
Inventors
SCHINDELE, Jens
SORGER, Alexander
SOMMER, Maximilian
MELNIKOV, Anton
Priority Data
102024205838.6
24.06.2024
DE
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
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| Number of Pages with Drawings | * |
| Pages of Specification | * |
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| Number of Office Actions | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
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| * | |
| * | |
| * | |
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| 译文 |
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* The data is based on automatic recognition. Please verify and amend if necessary.
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1997 | |
| EPO | Filing, Examination, Granting | 8107 | |
| Japan | Filing, Examination, Granting | 2122 | |
| South Korea | Filing, Examination, Granting | 2004 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
18,970
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Abstract[German]
MEMS-Vorrichtung (10) mit einem beweglichen Verdrängungselement (12) und einer Antriebseinrichtung (14) zum Antreiben des beweglichen Verdrängungselements (12), wobei die Antriebseinrichtung (14) wenigstens eine Antriebselektrode (16) aufweist, dadurch gekennzeichnet, dass die Antriebselektrode (16) segmentiert ist und wenigstens eine Funktionselektrode (18) zur Messung der Auslenkung des Verdrängungselements (12) vorgesehen ist.[English]
MEMS apparatus (10) having a movable displacement element (12) and a drive device (14) for driving the movable displacement element (12), the drive device (14) having at least one drive electrode (16), characterized in that the drive electrode (16) is segmented and at least one functional electrode (18) is provided for measuring the deflection of the displacement element (12).[French]
Appareil MEMS (10) ayant un élément de déplacement mobile (12) et un dispositif d'entraînement (14) pour entraîner l'élément de déplacement mobile (12), le dispositif d'entraînement (14) ayant au moins une électrode d'entraînement (16), caractérisé en ce que l'électrode d'entraînement (16) est segmentée et au moins une électrode fonctionnelle (18) est prévue pour mesurer la déviation de l'élément de déplacement (12).