WO2025228782 - MEMS-WANDLERELEMENT UND MEMS-BAUELEMENT
National phase entry is expected:
Publication Number
WO/2025/228782
Publication Date
06.11.2025
International Application No.
PCT/EP2025/061202
International Filing Date
24.04.2025
Title **
[German]
MEMS-WANDLERELEMENT UND MEMS-BAUELEMENT
[English]
MEMS TRANSDUCER ELEMENT AND MEMS COMPONENT
[French]
ÉLÉMENT TRANSDUCTEUR DE MEMS ET COMPOSANT DE MEMS
Applicants **
ROBERT BOSCH GMBH
Inventors
SCHELLING, Christoph
SCHINDELE, Jens
SOMMER, Maximilian
MELNIKOV, Anton
Priority Data
102024204092.4
02.05.2024
DE
Application details
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| 译文 |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1940 | |
| EPO | Filing, Examination, Granting | 8107 | |
| Japan | Filing, Examination, Granting | 2061 | |
| South Korea | Filing, Examination, Granting | 1879 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
18,727
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Abstract[German]
Die Erfindung betrifft ein MEMS-Wandlerelement, umfassend: ein Substrat aufweisend eine Substratausnehmung, zumindest eine in der Substratausnehmung angeordnete Lamelle, welche jeweils zwei benachbarte, komplementäre Fluidvolumina voneinander abgrenzt, wobei die zumindest eine Lamelle mehrere, insbesondere im Wesentlichen parallel, nebeneinander in einer Haupterstreckungsrichtung verlaufende Längssegmente und zumindest ein Quersegment umfasst, mittels welchem jeweils Längsenden der Längssegmente miteinander verbunden sind. Die Erfindung betrifft weiter ein fluidisch interagierendes MEMS-Bauelement.[English]
The invention relates to a MEMS transducer element, comprising: a substrate having a substrate recess, at least one lamella which is arranged in the substrate recess and delimits in each case two adjacent, complementary fluid volumes from one another, wherein the at least one lamella comprises a plurality of longitudinal segments which run, in particular substantially parallel, next to one another in a main direction of extent, and at least one transverse segment by means of which respective longitudinal ends of the longitudinal segments are connected to one another. The invention further relates to a fluidically interacting MEMS component.[French]
L'invention concerne un élément transducteur de MEMS, comprenant : un substrat comportant un évidement de substrat, au moins une lamelle qui est disposée dans l'évidement de substrat et délimite dans chaque cas deux volumes de fluide complémentaires adjacents l'un de l'autre, l'au moins une lamelle comprenant une pluralité de segments longitudinaux qui s'étendent, en particulier sensiblement parallèles, les uns à côté des autres dans une direction principale de l'étendue, et au moins un segment transversal au moyen duquel des extrémités longitudinales respectives des segments longitudinaux sont reliées les unes aux autres. L'invention concerne en outre un composant de MEMS à interaction fluidique.