WO2025202376 - AN OPTICAL INSPECTION DEVICE ARRANGED FOR OPTICALLY INSPECTING A SEMICONDUCTOR DEVICE, AS WELL AS A CORRESPONDING METHOD
National phase entry is expected:
Publication Number
WO/2025/202376
Publication Date
02.10.2025
International Application No.
PCT/EP2025/058430
International Filing Date
27.03.2025
Title **
[English]
AN OPTICAL INSPECTION DEVICE ARRANGED FOR OPTICALLY INSPECTING A SEMICONDUCTOR DEVICE, AS WELL AS A CORRESPONDING METHOD
[French]
DISPOSITIF D'INSPECTION OPTIQUE CONÇU POUR INSPECTER OPTIQUEMENT UN DISPOSITIF À SEMI-CONDUCTEUR, AINSI QUE PROCÉDÉ CORRESPONDANT
Applicants **
NEXPERIA B.V.
Inventors
YEUNG, Chi Shing
LEUNG, Chi To
Priority Data
24167183.3
28.03.2024
EP
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
| * | |
| Number of Office Actions | * |
| * | |
International Searching Authority |
EPO
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
* |
| Patent Delivery |
Send the Letters Patent by Courier
* |
| 译文 |
|
* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2024 | |
| EPO | Filing, Examination, Granting | 8126 | |
| Japan | Filing, Examination, Granting | 2155 | |
| South Korea | Filing, Examination, Granting | 2071 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
19,116
Contact Us
Abstract[English]
An Optical Inspection device arranged for optically inspecting a semiconductor device, said Optical Inspection device comprising a camera, a lens mounted to said camera and configured for providing multiple optical paths towards said semiconductor device, a first of said multiple optical paths arranged for providing a first view of said semiconductor device, and a second of said multiple optical paths arranged for providing a second view, different to said first view, of said semiconductor device, a focus compensation prism provided in said first of said multiple optical paths and adapted for compensating for different lengths of said multiple optical paths, a mirror provided in said first of said multiple optical paths for redirecting said first of said multiple optical paths to said semiconductor device to thereby obtain said first view of said semiconductor device.[French]
L'invention concerne un dispositif d'inspection optique conçu pour inspecter optiquement un dispositif à semi-conducteur, ledit dispositif d'inspection optique comprenant une caméra, une lentille montée sur ladite caméra et conçue pour fournir plusieurs chemins optiques vers ledit dispositif à semi-conducteur, un premier desdits multiples chemins optiques étant conçu pour fournir une première vue dudit dispositif à semi-conducteur, et un second desdits multiples chemins optiques conçus pour fournir une seconde vue, différente de ladite première vue, dudit dispositif à semi-conducteur, un prisme de compensation de mise au point disposé dans ledit premier desdits multiples chemins optiques et conçu pour compenser différentes longueurs desdits multiples chemins optiques, un miroir disposé dans ledit premier desdits multiples chemins optiques pour rediriger ledit premier desdits multiples chemins optiques vers ledit dispositif à semi-conducteur, ce qui permet d'obtenir ladite première vue dudit dispositif à semi-conducteur.