WO2023194483 - SUBSTRATE COMPRISING CONFORMAL METAL CARBIDE COATING

National phase entry:
Publication Number WO/2023/194483
Publication Date 12.10.2023
International Application No. PCT/EP2023/059028
International Filing Date 05.04.2023
Title **
[English] SUBSTRATE COMPRISING CONFORMAL METAL CARBIDE COATING
[French] SUBSTRAT COMPRENANT UN REVÊTEMENT DE CARBURE MÉTALLIQUE CONFORME
Applicants **
SGL CARBON SE
Inventors
WIJAYAWARDHANA, Charles
THIELEMANN, Christian
HUANG, Jing-Jia
FORSBERG, Urban
PEDERSEN, Henrik
Priority Data
102022203416.3   06.04.2022   DE
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting2221
EPO Filing, Examination, Granting9252
Japan Filing, Examination, Granting2183
South Korea Filing, Examination, Granting2133
USA Filing, Examination, Granting5940
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Total: 21,729

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Abstract[English] In a first aspect, the present disclosure relates to a method for coating a substrate with a metal or transition metal carbide by thermal chemical vapor deposition, wherein the method comprises the following steps: -Placing a substrate in a reaction chamber, and -Supplying the reaction chamber with SiCl4, ethene and a carrier gas, and wherein a process temperature in the reaction chamber is between about 900 °C to about 1050 °C.[French] Selon un premier aspect, la présente invention concerne un procédé de revêtement d'un substrat avec un métal ou un carbure de métal de transition par dépôt chimique en phase vapeur thermique, le procédé comprenant les étapes suivantes : - le placement d'un substrat dans une chambre de réaction, et - l'alimentation de la chambre de réaction avec du SiCl4, de l'éthène et un gaz porteur, et une température de traitement dans la chambre de réaction étant comprise entre environ 900 °C et environ 1050° C