WO2026119357 - SPUTTERVORRICHTUNG, VERWENDEN, UND VERFAHREN
National phase entry is expected:
Publication Number
WO/2026/119357
Publication Date
11.06.2026
International Application No.
PCT/DE2025/101134
International Filing Date
01.12.2025
Title **
[German]
SPUTTERVORRICHTUNG, VERWENDEN, UND VERFAHREN
[English]
SPUTTERING DEVICE, USE, AND METHOD
[French]
DISPOSITIF DE PULVÉRISATION CATHODIQUE, UTILISATION ET PROCÉDÉ
Applicants **
VON ARDENNE ASSET GMBH & CO. KG
Inventors
MOSSHAMMER, Steffen
Priority Data
102024136486.6
06.12.2024
DE
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
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| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
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| Number of Office Actions | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| 译文 |
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* The data is based on automatic recognition. Please verify and amend if necessary.
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2238 | |
| EPO | Filing, Examination, Granting | 8905 | |
| Japan | Filing, Examination, Granting | 2155 | |
| South Korea | Filing, Examination, Granting | 2071 | |
| USA | Filing, Examination, Granting | 6540 |
Total:
21,909
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Abstract[German]
Sputtervorrichtung, aufweisend: eine Targetkupplung (104), welche zum Ankuppeln eines Rohrtargets eingerichtet ist; ein Magnetsystem (602), das mehrere Polkörper (444) und zwei Stellglieder (304b) aufweist, wovon jedes Stellglied eingerichtet ist, eine räumliche Position der mehreren Polkörper (444) relativ zueinander zu beeinflussen; einen Client (302c) pro Stellglied der zwei Stellglieder (304b), der eingerichtet ist zum Anfordern von Informationen von einem Server (302s) gemäß einem Client-Server-Kommunikationsprotokoll und zum darauf basierenden Ansteuern des Stellglieds.[English]
The invention relates to a sputtering device, comprising: a target coupling (104), which is configured for coupling to a tubular target; a magnet system (602), which has a plurality of pole bodies (444) and two actuators (304b), each actuator being configured to influence a spatial position of the plurality of pole bodies (444) relative to one another; a client (302c) per actuator of the two actuators (304b), the client being configured to request information from a server (302s) according to a client-server communication protocol and to control the actuator on the basis thereof.[French]
L'invention concerne un dispositif de pulvérisation cathodique comprenant : un raccord de cible (104) conçu pour l'accouplement d'une cible tubulaire ; un système magnétique (602) comprenant plusieurs corps polaires (444) et deux actionneurs (304b), chaque actionneur étant conçu pour influer sur une position spatiale de la pluralité de corps polaires (444) les uns par rapport aux autres ; un client (302c) par actionneur des deux actionneurs (304b), qui est conçu pour demander des informations à un serveur (302s) selon un protocole de communication client-serveur et pour commander l'actionneur sur la base de celles-ci.