WO2023055451 - EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE
National phase entry:
Publication Number
WO/2023/055451
Publication Date
06.04.2023
International Application No.
PCT/US2022/035516
International Filing Date
29.06.2022
Title **
[English]
EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE
[French]
SOURCE D'IONS À DOUBLE CATHODE À CHAUFFAGE INDIRECT, À DURÉE DE VIE ÉTENDUE
Applicants **
AXCELIS TECHNOLOGIES, INC.
Inventors
PLATOW, Wilhelm
BASSOM, Neil
DAVID, Jonathan
Priority Data
17/491,084
30.09.2021
US
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
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| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2170 | |
| EPO | Filing, Examination, Granting | 10752 | |
| Japan | Filing, Examination, Granting | 2331 | |
| South Korea | Filing, Examination, Granting | 2360 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
22,353
The term for entry into the National Phase has expired. This quotation is for informational purposes only
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Abstract[English]
An ion source has an arc chamber with a first end and a second end. A first cathode at the first end of the arc chamber has a first cathode body and a first filament disposed within the first cathode body. A second cathode at the second end of the arc chamber has a second cathode body and a second filament disposed within the second cathode body. A filament switch selectively electrically couples a filament power supply to each of the first filament and the second filament, respectively, based on a position of the filament switch. A controller controls the position of the filament switch to alternate the electrical coupling of the filament power supply between the first filament and the second filament for a plurality of switching cycles based on predetermined criteria. The predetermined criteria can be a duration of operation of the first filament and second filament.[French]
Une source d'ions comporte une chambre à arc dotée d'une première extrémité et d'une seconde extrémité. Une première cathode, au niveau de la première extrémité de la chambre à arc, comporte un premier corps de cathode et un premier filament disposé à l'intérieur du premier corps de cathode. Une seconde cathode, au niveau de la seconde extrémité de la chambre à arc, comporte un second corps de cathode et un second filament disposé à l'intérieur du second corps de cathode. Un commutateur de filament couple électriquement de manière sélective une alimentation électrique de filament vers le premier filament et vers le second filament, respectivement, en fonction d'une position du commutateur de filament. Un dispositif de commande peut commander la position du commutateur de filament afin d'alterner le couplage électrique de l'alimentation électrique de filament entre le premier filament et le second filament, pendant une pluralité de cycles de commutation, en fonction de critères prédéfinis. Les critères prédéfinis peuvent être une durée de fonctionnement du premier filament et du second filament.