WO2023132785 - APPARATUS FOR WAFER LEVEL TESTING OF SEMICONDCUTOR DEVICE
National phase entry:
Publication Number
WO/2023/132785
Publication Date
13.07.2023
International Application No.
PCT/SG2022/050008
International Filing Date
06.01.2022
Title **
[English]
APPARATUS FOR WAFER LEVEL TESTING OF SEMICONDCUTOR DEVICE
[French]
APPAREIL DE TEST DE NIVEAU DE TRANCHE DE DISPOSITIF À SEMI-CONDUCTEUR
Applicants **
COMPOUNDTEK PTE. LTD.
Inventors
CHEE WEI, Lee
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
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| Pages of Specification | * |
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International Searching Authority |
MOIP
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter II
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| Patent Delivery |
Send the Letters Patent by Courier
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| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1885 | |
| EPO | Filing, Examination, Granting | 11708 | |
| Japan | Filing, Examination, Granting | 2009 | |
| South Korea | Filing, Examination, Granting | 1310 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
21,652
The term for entry into the National Phase has expired. This quotation is for informational purposes only
Abstract[English]
The present invention relates to an apparatus (1) for wafer level testing of a semiconductor device (10). The apparatus comprises an opto-electronic unit (11), an optical interface (13) and an optical fiber array (12) optically coupled between the opto-electronic unit (11) and the optical interface (13). The opto-electronic unit (11) transmits one or more optical test signals to the semiconductor device (10) and receives one or more optical response signals from the semiconductor device (10) for testing at least one function of the semiconductor device (10). The optical interface (13) optically couples the optical fiber array (12) and the semiconductor device (10). Furthermore, the optical interface (13) includes a steering element (14) for steering the optical test signals towards the semiconductor device (10) and the response signals towards the optical fiber array (12).[French]
La présente invention concerne un appareil (1) de test de niveau de tranche d'un dispositif à semi-conducteur (10). L'appareil comprend une unité optoélectronique (11), une interface optique (13) et un réseau de fibres optiques (12) couplé optiquement entre l'unité optoélectronique (11) et l'interface optique (13). L'unité optoélectronique (11) transmet un ou plusieurs signaux de test optique au dispositif à semi-conducteur (10) et reçoit un ou plusieurs signaux de réponse optique provenant du dispositif à semi-conducteur (10) pour tester au moins une fonction du dispositif à semi-conducteur (10). L'interface optique (13) couple optiquement le réseau de fibres optiques (12) et le dispositif à semi-conducteur (10). En outre, l'interface optique (13) comprend un élément de direction (14) pour diriger les signaux de test optique vers le dispositif à semi-conducteur (10) et les signaux de réponse vers le réseau de fibres optiques (12).