WO2026041936 - DEVICE AND METHOD FOR LASER BEAM CAUSTIC MEASUREMENT AND LASER BEAM SYSTEM
National phase entry is expected:
Publication Number
WO/2026/041936
Publication Date
26.02.2026
International Application No.
PCT/IB2025/057299
International Filing Date
18.07.2025
Title **
[English]
DEVICE AND METHOD FOR LASER BEAM CAUSTIC MEASUREMENT AND LASER BEAM SYSTEM
[French]
DISPOSITIF ET PROCÉDÉ DE MESURE CAUSTIQUE DE FAISCEAU LASER ET SYSTÈME À FAISCEAU LASER
Applicants **
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
Inventors
ERHARD, Steffen
GRANSON, Viktor
KIENINGER, Clemens
HERDT, Andreas
HAHN, Vincent
Priority Data
18/808,169
19.08.2024
US
Application details
| Total Number of Claims/PCT | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1993 | |
| EPO | Filing, Examination, Granting | 8118 | |
| Japan | Filing, Examination, Granting | 2140 | |
| South Korea | Filing, Examination, Granting | 1983 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
18,974
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Abstract[English]
A device for measuring caustic parameters of a laser beam includes a beam splitter for splitting the laser beam into at least three spatially separated partial beams, and a detection unit for detecting images of the partial beams. A beam path from an input of the device to the beam splitter defines a beam axis for the laser beam, along which the laser beam propagates until entering the beam splitter. The beam splitter includes an optical lens, and a partially reflective surface configured to split the laser beam into the at least three partial beams by partial reflection within the optical lens. The optical lens is positioned off-axis such that an optical axis of the optical lens extends off-axis to the beam axis, and/or the optical lens is tilted such that the optical axis of the optical lens forms an angle with the beam axis that deviates from 0°.[French]
L'invention concerne un dispositif de mesure de paramètres caustiques d'un faisceau laser comprenant un diviseur de faisceau pour diviser le faisceau laser en au moins trois faisceaux partiels spatialement séparés, et une unité de détection pour détecter des images des faisceaux partiels. Un chemin de faisceau d'une entrée du dispositif au diviseur de faisceau définit un axe de faisceau pour le faisceau laser, le long duquel le faisceau laser se propage jusqu'à l'entrée dans le diviseur de faisceau. Le diviseur de faisceau comprend une lentille optique et une surface partiellement réfléchissante configurée pour diviser le faisceau laser en au moins trois faisceaux partiels par réflexion partielle à l'intérieur de la lentille optique. La lentille optique est positionnée hors axe de sorte qu'un axe optique de la lentille optique s'étende hors de l'axe de l'axe de faisceau, et/ou est inclinée de sorte que l'axe optique de la lentille optique forme un angle avec l'axe de faisceau qui s'écarte de 0°.