WO2025253244 - SPUTTER ION PUMP CATHODE

National phase entry is expected:
Publication Number WO/2025/253244
Publication Date 11.12.2025
International Application No. PCT/IB2025/055552
International Filing Date 29.05.2025
Title **
[English] SPUTTER ION PUMP CATHODE
[French] CATHODE DE POMPE À IONS DE PULVÉRISATION
Applicants **
EDWARDS VACUUM LLC
Inventors
CLEMENT, Derek Alexander
Priority Data
2407833.9   03.06.2024   GB
Application details
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting2023
EPO Filing, Examination, Granting8149
Japan Filing, Examination, Granting2169
South Korea Filing, Examination, Granting2050
USA Filing, Examination, Granting4740
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Total: 19,131
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Abstract[English] A sputter ion pump cathode (106) comprising: a sheet of material (200) having an aperture (202) therethrough; and a protrusion (204) extending along an axis (206) from an edge (208) of the aperture (202) inwards towards a central portion (210) of the aperture (202); wherein the protrusion (204) is twisted about the axis (206), for example, by approximate 90°.[French] L'invention concerne une cathode de pompe à ions de pulvérisation (106) comprenant : une feuille de matériau (200) ayant une ouverture (202) à travers celle-ci ; et une saillie (204) s'étendant le long d'un axe (206) à partir d'un bord (208) de l'ouverture (202) vers l'intérieur vers une partie centrale (210) de l'ouverture (202) ; la saillie (204) étant torsadée autour de l'axe (206), par exemple, d'environ 90°.

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