WO2025248452 - DEPTH-RESOLUTION OPTICAL MEASUREMENT SYSTEM
National phase entry is expected:
Publication Number
WO/2025/248452
Publication Date
04.12.2025
International Application No.
PCT/IB2025/055481
International Filing Date
27.05.2025
Title **
[English]
DEPTH-RESOLUTION OPTICAL MEASUREMENT SYSTEM
[French]
SYSTÈME DE MESURE OPTIQUE À RÉSOLUTION EN PROFONDEUR
Applicants **
NOVA LTD.
Inventors
BARAK, Gilad
Priority Data
63/652,667
28.05.2024
US
Application details
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International Searching Authority |
USPTO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| Translation |
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2275 | |
| EPO | Filing, Examination, Granting | 14693 | |
| Japan | Filing, Examination, Granting | 2359 | |
| South Korea | Filing, Examination, Granting | 2490 | |
| USA | Filing, Examination, Granting | 4510 |
Total:
26,327
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Abstract[English]
The present disclosure provides an optical measurement system comprising optics configured to project a pattern of radiation onto a top of a patterned object having microscopic patterns, a first detection sub-channel configured to receive first radiation comprising reflected radiation from the top of the patterned object, a second detection sub-channel configured to receive second radiation comprising smeared radiation scattered from a below top region of the patterned object, and a processing circuit configured to process signals from the first and second detection sub-channels to provide information regarding the patterned object. The system enables differentiation between top and below top features of the patterned object by analyzing the reflected and smeared radiation separately.[French]
La présente invention concerne un système de mesure optique comprenant une optique configurée pour projeter un motif de rayonnement sur une partie supérieure d'un objet à motifs présentant des motifs microscopiques, un premier sous-canal de détection configuré pour recevoir un premier rayonnement comprenant le rayonnement réfléchi provenant de la partie supérieure de l'objet à motifs, un second sous-canal de détection configuré pour recevoir un second rayonnement comprenant le rayonnement étalé diffusé à partir d'une région inférieure de l'objet à motifs, et un circuit de traitement configuré pour traiter des signaux provenant des premier et second sous-canaux de détection afin de fournir des informations concernant l'objet à motifs. Le système permet une différenciation entre des caractéristiques supérieure et inférieure de l'objet à motifs en analysant séparément le rayonnement réfléchi et le rayonnement étalé.