WO2026003609 - METHOD AND DEVICE FOR DETERMINING A HEIGHT MAP

National phase entry is expected:
Publication Number WO/2026/003609
Publication Date 02.01.2026
International Application No. PCT/IB2025/055436
International Filing Date 27.05.2025
Title **
[English] METHOD AND DEVICE FOR DETERMINING A HEIGHT MAP
[French] PROCÉDÉ ET DISPOSITIF DE DÉTERMINATION D'UNE CARTE DE HAUTEUR
Applicants **
MITUTOYO CORPORATION
Inventors
REDLARSKI, Lukasz
Priority Data
24184028.9   24.06.2024   EP
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting2023
EPO Filing, Examination, Granting8143
Japan Filing, Examination, Granting2181
South Korea Filing, Examination, Granting2043
USA Filing, Examination, Granting4740
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Total: 19,130
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Abstract[English] The current invention relates to a method for determining a height map of a sample surface of a sample. The invention further relates to a method for determining a height map of a sample surface comprising a pre-scan step and a high-accuracy scan step. The invention further relates to an optical profilometry device configured for determining a height map of the sample surface. The invention further relates to a computer readable data carrier comprising a computer program.[French] La présente invention concerne un procédé de détermination d'une carte de hauteur d'une surface d'échantillon d'un échantillon. L'invention concerne en outre un procédé de détermination d'une carte de hauteur d'une surface d'échantillon comprenant une étape de pré-balayage et une étape de balayage de haute précision. L'invention concerne en outre un dispositif de profilométrie optique conçu pour déterminer une carte de hauteur de la surface d'échantillon. L'invention concerne en outre un support de données lisible par ordinateur comprenant un programme informatique.

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