WO2025133753 - SPUTTER ION PUMP CATHODE

National phase entry is expected:
Publication Number WO/2025/133753
Publication Date 26.06.2025
International Application No. PCT/IB2024/061592
International Filing Date 20.11.2024
Title **
[English] SPUTTER ION PUMP CATHODE
[French] CATHODE DE POMPE IONIQUE À PULVÉRISATION
Applicants **
EDWARDS VACUUM LLC
Inventors
SINHA, Tanya
THIERLEY, Marcus Hans Robert
Priority Data
2319476.4   19.12.2023   GB
Application details
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting2023
EPO Filing, Examination, Granting8133
Japan Filing, Examination, Granting2178
South Korea Filing, Examination, Granting2043
USA Filing, Examination, Granting4740
MasterCard Visa
Total: 19,117
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Abstract[English] A sputter ion pump cathode (106) comprising: a first plate (201) of a first material; and a second plate (202) of a second material; wherein the first plate (201) is arranged facing and substantially parallel with the second plate (202); and the first material is a different material to the second material.[French] Cathode de pompe ionique à pulvérisation (106) comprenant : une première plaque (201) d'un premier matériau ; et une seconde plaque (202) d'un second matériau ; la première plaque (201) étant agencée en regard et sensiblement parallèle à la seconde plaque (202) ; et le premier matériau étant un matériau différent du second matériau.

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