WO2024089576 - SPUTTER ION PUMP
National phase entry is expected:
Publication Number
WO/2024/089576
Publication Date
02.05.2024
International Application No.
PCT/IB2023/060671
International Filing Date
23.10.2023
Title **
[English]
SPUTTER ION PUMP
[French]
POMPE IONIQUE À PULVÉRISATION CATHODIQUE
Applicants **
EDWARDS VACUUM LLC
Inventors
CLEMENT, Derek Alexander
Priority Data
2215909.9
27.10.2022
GB
2308544.2
08.06.2023
GB
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
| * | |
| Number of Office Actions | * |
| * | |
International Searching Authority |
EPO
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
* |
| Patent Delivery |
Send the Letters Patent by Courier
* |
| Translation |
|
* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2197 | |
| EPO | Filing, Examination, Granting | 10289 | |
| Japan | Filing, Examination, Granting | 2327 | |
| South Korea | Filing, Examination, Granting | 2296 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
21,849
The term for entry into the National Phase has expired. This quotation is for informational purposes only
Abstract[English]
Sputter ion pump comprising: an anode (14), wherein the anode comprises a radial symmetry and wherein the anode defines a plurality of hollow cylinders and is connected to a voltage supply, a cathode comprising a plurality of cathode elements (22, 22', 22") arranged directly next to the anode and connected to ground.[French]
L'invention concerne une pompe ionique à pulvérisation cathodique comprenant : une anode (14), l'anode comprenant une symétrie radiale et l'anode définissant une pluralité de cylindres creux et étant reliée à une alimentation en tension, une cathode comprenant une pluralité d'éléments de cathode (22, 22', 22") disposés directement à côté de l'anode et reliés à la masse.