WO2024074964 - SURFACE CHARACTERIZATION OF MATERIALS USING CATHODOLUMINESCENCE
National phase entry:
Publication Number
WO/2024/074964
Publication Date
11.04.2024
International Application No.
PCT/IB2023/059804
International Filing Date
29.09.2023
Title **
[English]
SURFACE CHARACTERIZATION OF MATERIALS USING CATHODOLUMINESCENCE
[French]
CARACTÉRISATION DE SURFACE DE MATÉRIAUX PAR CATHODOLUMINESCENCE
Applicants **
SILANNA UV TECHNOLOGIES PTE LTD
Inventors
ATANACKOVIC, Petar
LANE, Dominic
Priority Data
63/378,684
07.10.2022
US
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
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| Number of Office Actions | * |
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International Searching Authority |
MOIP
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 3893 | |
| EPO | Filing, Examination, Granting | 44063 | |
| Japan | Filing, Examination, Granting | 3554 | |
| South Korea | Filing, Examination, Granting | 3500 | |
| USA | Filing, Examination, Granting | 13340 |
Total:
68,350
The term for entry into the National Phase has expired. This quotation is for informational purposes only
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Abstract[English]
Methods and systems include generating, from an electron beam generator, an electron beam in a vacuum chamber. A mounting platform in the vacuum chamber is configured to support a material. The electron beam is directed at a surface region of the material at a grazing angle. A detector assembly, which may have an optical entry path positioned above the surface region, receives cathodoluminescent light emission arising from the electron beam transferring energy to the surface region. The detector assembly determines spectral characteristics of the cathodoluminescent light emission to characterize the surface region.[French]
Les procédés et les systèmes de l'invention comprennent la production, à partir d'un générateur de faisceau d'électrons, d'un faisceau d'électrons dans une chambre à vide. Une plateforme de montage dans la chambre à vide est configurée pour supporter un matériau. Le faisceau d'électrons est dirigé vers une région superficielle du matériau à un angle d'incidence. Un ensemble détecteur, qui peut comporter un chemin d'entrée optique placé au-dessus de la région de surface, reçoit l'émission de lumière de cathodoluminescence provenant du faisceau d'électrons transférant de l'énergie à la région de surface. L'ensemble détecteur détermine des caractéristiques spectrales de l'émission de lumière cathodoluminescente pour caractériser la région de surface.