WO2023238069 - ALIGNMENT MARK IN BUSY PIXEL LAYOUTS

National phase entry:
Publication Number WO/2023/238069
Publication Date 14.12.2023
International Application No. PCT/IB2023/055897
International Filing Date 07.06.2023
Title **
[English] ALIGNMENT MARK IN BUSY PIXEL LAYOUTS
[French] REPÈRE D'ALIGNEMENT DANS DES AGENCEMENTS DE PIXELS OCCUPÉS
Applicants **
VUEREAL INC.
Inventors
CHAJI, Gholamreza
FATHI, Ehsanollah
SIBONI, Hossein Zamani
Priority Data
63/349,872   07.06.2022   US
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting2999
EPO Filing, Examination, Granting27599
Japan Filing, Examination, Granting3141
South Korea Filing, Examination, Granting4141
USA Filing, Examination, Granting13540
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Total: 51,420

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Abstract[English] This disclosure relates to the process of alignment using at least an alignment mark or structure that exists on the system substrate (or donor substrate) and at least an alignment mark is associated with microdevices. The alignment marks used to align the microdevices are created by changing optical properties of the structure. The disclosure further outlines different alignment mark structures.[French] La présente invention concerne un procédé d'alignement utilisant au moins un repère ou une structure d'alignement présent sur le substrat de système (ou le substrat donneur) et au moins un repère d'alignement est associé à des micro-dispositifs. Les repères d'alignement utilisés pour aligner les micro-dispositifs sont créés par modification des propriétés optiques de la structure. L'invention concerne en outre différentes structures de repères d'alignement.

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