WO2023119165 - COMPOUNDS COMPRISING A PLURALITY OF SILSESQUIOXANE GROUPS FOR FORMING A PATTERNING COATING AND DEVICES INCORPORATING SAME

National phase entry:
Publication Number WO/2023/119165
Publication Date 29.06.2023
International Application No. PCT/IB2022/062560
International Filing Date 20.12.2022
Title **
[English] COMPOUNDS COMPRISING A PLURALITY OF SILSESQUIOXANE GROUPS FOR FORMING A PATTERNING COATING AND DEVICES INCORPORATING SAME
[French] COMPOSÉS COMPRENANT UNE PLURALITÉ DE GROUPES SILSESQUIOXANE POUR LA FORMATION D'UN REVÊTEMENT DE FORMATION DES MOTIFS, ET DISPOSITIFS LES INCORPORANT
Applicants **
OTI LUMIONICS INC.
Inventors
HELANDER, Michael
Priority Data
63/291,844   20.12.2021   US
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting5879
EPO Filing, Examination, Granting66420
Japan Filing, Examination, Granting3993
South Korea Filing, Examination, Granting5723
USA Filing, Examination, Granting17390
MasterCard Visa
Total: 99,405

The term for entry into the National Phase has expired. This quotation is for informational purposes only

Abstract[English] A compound, and a layered semiconductor device comprising a patterning coating provided in a first portion of a lateral aspect of the device, the patterning coating comprising the compound. The patterning coating is adapted to impact a propensity of a vapor flux of a deposited material to be condensed thereon. The compound comprises a plurality of silsesquioxane groups, including without limitation, first and second silsesquioxane groups and a linker group bonded to the first silsesquioxane group and the second silsesquioxane group, wherein at least one of the first and second silsesquioxane groups comprises a fluorine-containing moiety. The device comprises a deposited layer provided in a second portion of the lateral aspect of the device, the deposited layer comprising the deposited material.[French] L'invention concerne un composé, et un dispositif à semi-conducteur en couches comprenant un revêtement de formation des motifs disposé dans une première partie d'un aspect latéral du dispositif, le revêtement de formation des motifs comprenant le composé. Le revêtement de formation des motifs peut être conçu pour influer sur la propension d'un flux de vapeur d'un matériau déposé à se condenser sur celui-ci. Le composé comprend une pluralité de groupes silsesquioxane, y compris sans limitation des premier et second groupes silsesquioxane et un groupe de liaison lié au premier groupe silsesquioxane et au second groupe silsesquioxane, au moins un des premier et second groupes silsesquioxane comprenant une fraction contenant du fluor. Le dispositif comprend une couche déposée disposée dans une seconde partie de l'aspect latéral du dispositif, la couche déposée comprenant le matériau déposé.

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