WO2025233356 - MEMS-BAULEMENT MIT THERMISCH ISOLIERENDER ABDECKUNG
National phase entry is expected:
Publication Number
WO/2025/233356
Publication Date
13.11.2025
International Application No.
PCT/EP2025/062385
International Filing Date
06.05.2025
Title **
[German]
MEMS-BAULEMENT MIT THERMISCH ISOLIERENDER ABDECKUNG
[English]
MEMS COMPONENT WITH THERMALLY INSULATING COVERING
[French]
COMPOSANT MEMS À REVÊTEMENT THERMIQUEMENT ISOLANT
Applicants **
ROBERT BOSCH GMBH
Inventors
SCHELLING, Christoph
Priority Data
102024204313.3
08.05.2024
DE
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
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| Number of Pages with Drawings | * |
| Pages of Specification | * |
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| Number of Office Actions | * |
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International Searching Authority |
EPO
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
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| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
* |
| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2023 | |
| EPO | Filing, Examination, Granting | 8159 | |
| Japan | Filing, Examination, Granting | 2170 | |
| South Korea | Filing, Examination, Granting | 2051 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
19,143
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Abstract[German]
MEMS-Bauelement mit einem Träger und einer ersten Abdeckung, wobei zwischen dem Träger und der ersten Abdeckung ein Innenraum ausgebildet ist, wobei im Innenraum ein MEMS-Element angeordnet ist, wobei das MEMS-Element ausgebildet ist, um mit einem Fluid in Wechselwirkung zu treten, wobei die erste Abdeckung fest mit dem Träger verbunden ist, wobei zwischen dem MEMS-Element und der ersten Abdeckung eine thermisch isolierende zweite Abdeckung vorgesehen ist, wobei die zweite Abdeckung an der ersten Abdeckung kraft- und/oder formschlüssig befestigt ist, wobei zwischen der ersten Abdeckung und der zweiten Abdeckung wenigstens teilweise ein Luftraum ausgebildet ist.[English]
A MEMS component with a substrate and a first covering, wherein an interior space is formed between the substrate and the first covering, wherein a MEMS element is arranged in the interior space, wherein the MEMS element is designed to interact with a fluid, wherein the first covering is fixedly connected to the substrate, wherein a thermally insulating second covering is provided between the MEMS element and the first covering, wherein the second covering is fastened to the first covering in a frictionally engaging and/or interlocking manner, wherein there is at least partially an air space between the first covering and the second covering.[French]
L'invention concerne un composant MEMS avec un substrat et un premier revêtement, un espace intérieur étant formé entre le substrat et le premier revêtement, un élément MEMS étant disposé dans l'espace intérieur, l'élément MEMS étant conçu pour interagir avec un fluide, le premier revêtement étant relié à demeure au substrat, un second revêtement thermiquement isolant étant disposé entre l'élément MEMS et le premier revêtement, le second revêtement étant fixé au premier revêtement par mise en prise par frottement et/ou interverrouillage, au moins un espace d'air se trouvant partiellement entre le premier revêtement et le second revêtement.