WO2025195938 - MIKROMECHANISCHER DRUCKSENSOR
National phase entry is expected:
Publication Number
WO/2025/195938
Publication Date
25.09.2025
International Application No.
PCT/EP2025/057147
International Filing Date
17.03.2025
Title **
[German]
MIKROMECHANISCHER DRUCKSENSOR
[English]
MICROMECHANICAL PRESSURE SENSOR
[French]
CAPTEUR DE PRESSION MICROMÉCANIQUE
Applicants **
ROBERT BOSCH GMBH
Inventors
GLAS, Manuel
DANNENBERG, Arne
MENZEL, Andreas
KLEIN, Michael
SCHOENHALS, Alexander
Priority Data
102024202674.3
21.03.2024
DE
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
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| Number of Pages with Drawings | * |
| Pages of Specification | * |
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| Number of Office Actions | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
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| * | |
| * | |
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
* |
| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 2023 | |
| EPO | Filing, Examination, Granting | 8159 | |
| Japan | Filing, Examination, Granting | 2171 | |
| South Korea | Filing, Examination, Granting | 2051 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
19,144
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Abstract[German]
Mikromechanischer Drucksensor (1) mit zwei MEMS-Chips (2, 3) mit je mindestens einer drucksensitiven Membran (4, 5), wobei die beiden MEMS-Chips (2, 3) in einer gestapelten Anordnung angeordnet sind und eine Auslenkung der Membranen (4, 5) durch eine zu messende Krafteinwirkung in einander entgegengesetzte Richtungen erfolgt. Eine Wirkung der Schwerkraft auf die Membranen (4, 5) erfolgt in dieselbe Richtung, sodass ein Einfluss der Schwerkraftwirkung auf das Messergebnis wenigstens teilweise kompensiert wird.[English]
The invention relates to a micromechanical pressure sensor (1) having two MEMS chips (2, 3) each having at least one pressure-sensitive membrane (4, 5), wherein the two MEMS chips (2, 3) are arranged in a stacked arrangement and the membranes (4, 5) are deflected in opposite directions by an action of force to be measured. The force of gravity acts on the membranes (4, 5) in the same direction such that an influence of the effect of gravity on the measurement result is at least partially compensated.[French]
L'invention concerne un capteur de pression micromécanique (1) omprenant deux puces MEMS (2, 3) ayant chacune au moins une membrane (4, 5) sensible à la pression, les deux puces MEMS (2, 3) étant agencées selon un agencement empilé et les membranes (4, 5) étant déviées dans des directions opposées par une action de force à mesurer. La force de gravité agit sur les membranes (4, 5) dans la même direction de telle sorte qu'une influence de l'effet de la gravité sur le résultat de mesure est au moins partiellement compensée.