WO2025247507 - APPARATUS FOR TRANSFERRING A SEMICONDUCTOR DIE FROM AN ARRANGEMENT OF SEMICONDUCTOR DIES TO A TARGET

National phase entry is expected:
Publication Number WO/2025/247507
Publication Date 04.12.2025
International Application No. PCT/EP2024/065112
International Filing Date 31.05.2024
Title **
[English] APPARATUS FOR TRANSFERRING A SEMICONDUCTOR DIE FROM AN ARRANGEMENT OF SEMICONDUCTOR DIES TO A TARGET
[French] APPAREIL DE TRANSFERT D'UNE PUCE SEMI-CONDUCTRICE D'UN AGENCEMENT DE PUCES SEMI-CONDUCTRICES VERS UNE CIBLE
Applicants **
NEXPERIA B.V.
Inventors
STOKKERMANS, Joep
WESSELINGH, Jasper
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting1923
EPO Filing, Examination, Granting8147
Japan Filing, Examination, Granting2142
South Korea Filing, Examination, Granting1897
USA Filing, Examination, Granting4740
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Total: 18,849
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Abstract[English] The present disclosure proposes an apparatus for transferring a semiconductor die (2) from an arrangement of semiconductor dies to a target. The apparatus according to the disclosure comprises a wafer stage (5) which is configured to receive a flexible carrier (14) on which the arrangement of semiconductor dies can be arranged, wherein the flexible carrier (14) is a sheet like element having at least two pairs of opposite edges wherein opposite edges are at least partially substantially parallel, wherein the wafer stage (5) comprising: a releasing unit (4) for releasing a semiconductor die from the arrangement of semiconductor dies, a controller for controlling the releasing unit and/or the wafer stage, a first archlike edge mount (7a) suitable for receiving first edge of flexible carrier (14) and a second archlike edge mount (7b) suitable for receiving second edge of flexible carrier (14) opposite the edge received by the first archlike edge mount (7a) at least two motors (16) having common rotation axis each coupled to the archlike edge mounts (7a, 7b) accordingly, wherein the two motors are configured for synchronously rotating each of the archlike edge mounts (7a, 7b) around a rotational axis.[French] La présente divulgation concerne un appareil de transfert d'une puce semi-conductrice (2) d'un agencement de puces semi-conductrices vers une cible. L'appareil selon l'invention comprend un étage de tranche (5) qui est configuré pour recevoir un support souple (14) sur lequel l'agencement de puces semi-conductrices peut être agencé ; le support souple (14) est un élément à feuille ayant au moins deux paires de bords opposés, des bords opposés étant au moins partiellement sensiblement parallèles ; l'étage de tranche (5) comprend : une unité de libération (4) permettant de libérer une puce semi-conductrice de l'agencement de puces semi-conductrices, un dispositif de commande pour commander l'unité de libération et/ou l'étage de tranche, un premier support de bord en forme d'arc (7a) approprié pour recevoir un premier bord de support flexible (14) et un second support de bord en forme d'arc (7b) approprié pour recevoir un second bord de support flexible (14) opposé au bord reçu par le premier support de bord en forme d'arc (7a) , et au moins deux moteurs (16) ayant un axe de rotation commun chacun couplé aux supports de bord en forme d'arc (7a, 7b) en conséquence ; lesdits deux moteurs sont configurés pour faire tourner de manière synchrone chacun des supports de bord en forme d'arc (7a, 7b) autour d'un axe de rotation.

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