WO2023180216 - NEGATIVELY CHARGED SILICA PARTICLES, METHOD OF PRODUCING SUCH PARTICLES, COMPOSITIONS COMPRISING SUCH PARTICLES, AND A METHOD OF CHEMICAL-MECHANICAL POLISHING USING SUCH PARTICLES

National phase entry:
Publication Number WO/2023/180216
Publication Date 28.09.2023
International Application No. PCT/EP2023/056981
International Filing Date 20.03.2023
Title **
[English] NEGATIVELY CHARGED SILICA PARTICLES, METHOD OF PRODUCING SUCH PARTICLES, COMPOSITIONS COMPRISING SUCH PARTICLES, AND A METHOD OF CHEMICAL-MECHANICAL POLISHING USING SUCH PARTICLES
[French] PARTICULES DE SILICE CHARGÉES NÉGATIVEMENT, PROCÉDÉ DE PRODUCTION DE TELLES PARTICULES, COMPOSITIONS COMPRENANT DE TELLES PARTICULES, ET PROCÉDÉ DE POLISSAGE CHIMICO-MÉCANIQUE UTILISANT DE TELLES PARTICULES
Applicants **
MERCK PATENT GMBH
Inventors
JACQUINOT, Eric
GUILLAUD, Frederic
Priority Data
22305336.4   22.03.2022   EP
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting1998
EPO Filing, Examination, Granting8131
Japan Filing, Examination, Granting2130
South Korea Filing, Examination, Granting1994
USA Filing, Examination, Granting4740
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Total: 18,993

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Abstract[English] The present application relates to negatively charged silica particles, to a method of producing such particles, and to compositions comprising such particles as well as to a method for chemical mechanical polishing.[French] La présente invention concerne des particules de silice chargées négativement, un procédé de production de telles particules, et des compositions comprenant de telles particules ainsi qu'un procédé de polissage chimico-mécanique.

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