WO2026124705 - METHOD OF ANALYSIS OF A SAMPLE SURFACE
National phase entry is expected:
Publication Number
WO/2026/124705
Publication Date
18.06.2026
International Application No.
PCT/CZ2025/050100
International Filing Date
09.12.2025
Title **
[English]
METHOD OF ANALYSIS OF A SAMPLE SURFACE
[French]
PROCÉDÉ D'ANALYSE D'UNE SURFACE D'ÉCHANTILLON
Applicants **
TESCAN GROUP A.S.
Inventors
KAŠTYL, Jaroslav
Priority Data
PV2024-477
10.12.2024
CZ
Application details
| Total Number of Claims/PCT | * |
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| Number of Multi-Dependent Claims | * |
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International Searching Authority |
EPO
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| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
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| Type of Assignment |
The Standard Agent's Assignment
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| Applicant's Legal Status |
Legal Entity
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| * | |
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| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
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| Translation |
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Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1879 | |
| EPO | Filing, Examination, Granting | 8163 | |
| Japan | Filing, Examination, Granting | 1799 | |
| South Korea | Filing, Examination, Granting | 1312 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
17,893
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Abstract[English]
The object of the invention is a method of analysis of a sample surface using a charged particle beam device consisting in acquiring an image of the sample (5), dividing it into a matrix with a determined matrix window size, and creating sub-histograms of the individual matrix windows. Subsequently, the similarity of the individual sub-histograms to the histogram of the acquired image of the sample (5) is calculated based on a decision criterion. Subsequently, information that the sub-histograms are not similar to the histogram of the acquired image of the sample (5) at the given matrix window size is issued, if the number of sub-histograms different from the histogram of the acquired image of the sample (5) is greater than the limit number of sub-histograms different from the histogram of the acquired image of the sample (5), otherwise, information that the sub-histograms are similar to the histogram of the acquired image of the sample (5) is issued.[French]
L'objet de l'invention est un procédé d'analyse d'une surface d'échantillon à l'aide d'un dispositif à faisceau de particules chargées consistant à acquérir une image de l'échantillon (5), à diviser celle-ci en une matrice avec une taille de fenêtre de matrice déterminée, et à créer des sous-histogrammes des fenêtres de matrice individuelles. Ensuite, la similarité des sous-histogrammes individuels à l'histogramme de l'image acquise de l'échantillon (5) est calculée sur la base d'un critère de décision. Ensuite, des informations indiquant que les sous-histogrammes ne sont pas similaires à l'histogramme de l'image acquise de l'échantillon (5) à la taille de fenêtre de matrice donnée sont émises, si le nombre de sous-histogrammes différents de l'histogramme de l'image acquise de l'échantillon (5) est supérieur au nombre limite de sous-histogrammes différents de l'histogramme de l'image acquise de l'échantillon (5), sinon, des informations indiquant que les sous-histogrammes sont similaires à l'histogramme de l'image acquise de l'échantillon (5) sont émises.