WO2026109094 - COMBINED ELECTROSTATIC-MAGNETIC OBJECTIVE LENS
National phase entry is expected:
Publication Number
WO/2026/109094
Publication Date
28.05.2026
International Application No.
PCT/CZ2025/050094
International Filing Date
24.11.2025
Title **
[English]
COMBINED ELECTROSTATIC-MAGNETIC OBJECTIVE LENS
[French]
LENTILLE D'OBJECTIF COMBINÉ ÉLECTROSTATIQUE-MAGNÉTIQUE
Applicants **
TESCAN GROUP A.S.
Inventors
SYTAŘ, Petr
MARŠÍK, Jiří
Priority Data
PV2024-454
25.11.2024
CZ
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
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| Number of Office Actions | * |
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International Searching Authority |
EPO
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
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| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
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| Patent Delivery |
Send the Letters Patent by Courier
* |
| Translation |
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* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1879 | |
| EPO | Filing, Examination, Granting | 8149 | |
| Japan | Filing, Examination, Granting | 1734 | |
| South Korea | Filing, Examination, Granting | 1186 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
17,688
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Abstract[English]
A combined electrostatic-magnetic objective lens located in a column of a device (1) having at least one charged particle beam, where the column further comprises a potential tube (16) positioned along an optical axis (18) of the column (2), wherein the lower end of the potential tube (16) comprises mechanically and electrically connected and at least partially electrically conductive segments, one or more of the segments being made of a paramagnetic or diamagnetic material and one or more segments (20) being made of a ferromagnetic material, wherein the first segment is made of a paramagnetic or diamagnetic material and each additional segment is made of a paramagnetic or diamagnetic material or a ferromagnetic material, wherein the first segment is located closer to the source (7) of electrons than the other segments.[French]
Objectif combiné électrostatique-magnétique situé dans une colonne d'un dispositif (1) présentant au moins un faisceau de particules chargées, la colonne comprenant en outre un tube de potentiel (16) positionné le long d'un axe optique (18) de la colonne (2). L'extrémité inférieure du tube de potentiel (16) comprend des segments connectés mécaniquement et électriquement et au moins partiellement conducteurs électriquement, un ou plusieurs des segments étant constitués d'un matériau paramagnétique ou diamagnétique et un ou plusieurs segments (20) étant constitués d'un matériau ferromagnétique, le premier segment étant constitué d'un matériau paramagnétique ou diamagnétique, et chaque segment supplémentaire est constitué d'un matériau paramagnétique ou diamagnétique ou d'un matériau ferromagnétique, le premier segment étant situé plus près de la source (7) d'électrons que les autres segments.