WO2026061565 - METHOD FOR DETERMINING THE POSITION OF THE TIP OF A MANIPULATOR OF A CHARGED PARTICLE BEAM DEVICE
National phase entry is expected:
Publication Number
WO/2026/061565
Publication Date
26.03.2026
International Application No.
PCT/CZ2025/050076
International Filing Date
12.09.2025
Title **
[English]
METHOD FOR DETERMINING THE POSITION OF THE TIP OF A MANIPULATOR OF A CHARGED PARTICLE BEAM DEVICE
[French]
PROCÉDÉ DE DÉTERMINATION DE LA POSITION DE LA POINTE D'UN MANIPULATEUR D'UN DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES
Applicants **
TESCAN GROUP A.S.
Inventors
VÁŇA, Rostislav
Priority Data
PV2024-360
18.09.2024
CZ
Application details
| Total Number of Claims/PCT | * |
| Number of Independent Claims | * |
| Number of Priorities | * |
| Number of Multi-Dependent Claims | * |
| Number of Drawings | * |
| Pages for Publication | * |
| Number of Pages with Drawings | * |
| Pages of Specification | * |
| * | |
| Number of Office Actions | * |
| * | |
International Searching Authority |
EPO
* |
| Recordal of a Change of the Applicant's Name/Address |
Change of Applicant's Name and Address
* |
| Type of Assignment |
The Standard Agent's Assignment
* |
| Applicant's Legal Status |
Legal Entity
* |
| * | |
| * | |
| * | |
| * | |
| * | |
| Entry into National Phase under |
Chapter I
* |
| Patent Delivery |
Send the Letters Patent by Courier
* |
| Translation |
|
* The data is based on automatic recognition. Please verify and amend if necessary.
** IP-Coster compiles data from publicly available sources. If this data includes your personal information, you can contact us to request its removal.
Quotation for National Phase entry
| Country | Stages | Total | |
|---|---|---|---|
| China | Filing, Examination, Granting | 1878 | |
| EPO | Filing, Examination, Granting | 8133 | |
| Japan | Filing, Examination, Granting | 1991 | |
| South Korea | Filing, Examination, Granting | 1676 | |
| USA | Filing, Examination, Granting | 4740 |
Total:
18,418
Contact Us
Abstract[English]
The object of the invention is a method of determining the position of the tip of a manipulator of a charged particle beam device, using the acquisition of two images with different directions of incidence of the charged particles beam on a sample. The tip of the manipulator located at a certain distance above the sample appears on the obtained images as the object which is most displaced in each image when these images are evaluated.[French]
L'invention a pour objet un procédé de détermination de la position de la pointe d'un manipulateur d'un dispositif à faisceau de particules chargées, utilisant l'acquisition de deux images avec des directions d'incidence différentes du faisceau de particules chargées sur un échantillon. La pointe du manipulateur située à une certaine distance au-dessus de l'échantillon apparaît sur les images obtenues comme l'objet le plus déplacé dans chaque image lorsque ces images sont évaluées.