WO2025251237 - MEMS MICROPHONE

National phase entry is expected:
Publication Number WO/2025/251237
Publication Date 11.12.2025
International Application No. PCT/CN2024/097641
International Filing Date 06.06.2024
Title **
[English] MEMS MICROPHONE
[French] MICROPHONE MEMS
[Chinese] MEMS麦克风
Applicants **
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
Inventors
ZHAO, Zhuanzhuan
LI, Bo
WANG, Kaijie
ZHANG, Rui
CHEN, Yu
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Quotation for National Phase entry

Country StagesTotal
China Filing, Examination, Granting1503
EPO Filing, Examination, Granting11761
Japan Filing, Examination, Granting2012
South Korea Filing, Examination, Granting1617
USA Filing, Examination, Granting4740
MasterCard Visa
Total: 21,633
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Abstract[English] The present utility model provides a MEMS microphone, comprising a substrate having a cavity, a backplate disposed above the substrate, a diaphragm disposed between the backplate and the substrate, and a limiting structure disposed in the cavity for limiting a maximum displacement of the diaphragm away from the backplate, wherein the maximum displacement is not less than a normal operating displacement of the diaphragm away from the backplate. The MEMS microphone of the present utility model has high reliability.[French] Le présent modèle d'utilité concerne un microphone MEMS, comprenant un substrat ayant une cavité, une plaque arrière disposée au-dessus du substrat, une membrane disposée entre la plaque arrière et le substrat, et une structure de limitation disposée dans la cavité pour limiter un déplacement maximal de la membrane à l'opposé de la plaque arrière, le déplacement maximal n'étant pas inférieur à un déplacement de fonctionnement normal de la membrane à l'opposé de la plaque arrière. Le microphone MEMS du présent modèle d'utilité présente une fiabilité élevée.[Chinese] 本实用新型的MEMS麦克风,包括具有空腔的基底、设置于所述基底上方的背板、设置于所述背板和所述基底之间的振膜、以及设置于所述空腔内用以限制所述振膜背离所述背板的最大位移的限位结构,所述最大位移不小于所述振膜背离所述背板的正常工作位移。本实用新型的MEMS麦克风的可靠性高。

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